Research on Normal Random Micro-vibration of Restrictors in Ultra-precision Gas Static Pressure Systems

doi:10.3969/j.issn.1004-132X.2020.20.005

Abstract

Abstract: College of Metrology & Measurement Engineering，China Jiliang University,Hangzhou,310018
Abstract: Taking the airless cavity planar restrictor as the research object, the theoretical simulation and experimental research were carried out on the flow-solid coupling normal random micro-vibrations of the restrictors. Constrained by the differences between the restrictor thickness and the film thickness and the initial boundary conditions of the input, a simplified COMSOL simulation model of the restrictor was established. Bidirectional fluid-solid coupling numerical simulation of the restrictor-gas film microfluidic field was carried out. The simulation results show that the amplitudes of the normal random micro-vibrations of the restrictor are symmetrical about the center of the restrictor. In addition, the amplitudes of the vibrations gradually increase from the center to the edge of the restrictor and increase as the flow rate of the inlet gas increases. A nano-scale laser vibrometer was employed to test the normal vibrations of several different positions of the HEXAGON double-ring type restrictor. The size of the restrictor was 75 mm×50 mm×14 mm, and the supply pressure was 0.1～0.5 MPa. The results show that the amplitude distribution characteristics of normal random micro-vibrations are consistent with the simulation results. The amplitudes are symmetric with respect to the center of the restrictor and gradually increase from the center to the edge, verifying the “seesaw” vibration forms of the normal vibrations of the restrictor. At a supply pressure of 0.5 MPa, the edge vibration amplitude reaches 1 nm or more. While the results of power spectral density analysis show that the normal random micro-vibrations of the restrictor carry a large power at 9.4 kHz and 10.6 kHz. It can be considered as the natural frequency of the restrictor-gas membrane fluid-solid coupling systems. The experimental results demonstrate the normal random micro-vibration characteristics of the restrictor effectively, and provide theoretical guidance for the design of the gas static pressure systems to avoid the stochastic resonance region and optimize the gas static pressure systems.

Key words: random micro-vibration, bidirectional fluid-structure coupling, power spectral density, gas film microfluidic field, restrictor

摘要：

以无气腔平面节流器为研究对象，对节流器流固耦合法向随机微振动进行了理论仿真和实验研究。受限于节流器厚度与气膜厚度尺寸的差异和输入初始边界条件，建立了节流器的COMSOL仿真简化模型，对节流器气膜微流场进行双向流固耦合数值模拟。仿真结果表明，节流器的法向随机微振动幅值关于节流器中心对称，且由中心向边缘逐渐增大；微振动幅值随气体入口流速的增大而增大。实验采用纳米级激光测振仪，依次测量供气压力为0.1，0.2,…，0.5 MPa时尺寸为75 mm×50 mm×14 mm的HEXAGON双环联结型节流器多个不同位置的法向振动，实验结果表明，法向随机微振动幅值分布特性与仿真结果一致，关于节流器中心对称，且由中心向边缘逐渐增大，验证了节流器法向微振动的“跷跷板”振动形式；在0.5 MPa供气压力下，边缘振动幅值超过1 nm。对实验数据进行功率谱密度分析，结果表明不同供气压力下法向随机微振动均在9.4 kHz和10.6 kHz处产生较大功率，可认为与节流器气膜流固耦合系统的固有频率有关。研究结果有效地揭示了节流器法向随机微振动的特性,为气体静压系统避开随机共振区、优化气体静压系统的设计提供了理论指导。

关键词: 随机微振动, 双向流固耦合, 功率谱密度, 气膜微流场, 节流器

CLC Number:

TH133.36

SHEN Xiaoyan;DING Jiawei;YU Jing;LI Dongsheng. Research on Normal Random Micro-vibration of Restrictors in Ultra-precision Gas Static Pressure Systems[J]. China Mechanical Engineering, DOI: 10.3969/j.issn.1004-132X.2020.20.005.

沈小燕;丁佳为;禹静;李东升. 超精密气体静压系统节流器法向随机微振动研究[J]. 中国机械工程, DOI: 10.3969/j.issn.1004-132X.2020.20.005.

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