Design and Experimental Investigation on High Efficient Horizontal Micro Electrical Discharge Machine

Abstract

Abstract:

To improve the efficiency of microelectrode fabrication, this paper proposed a high efficient horizontal micro electric discharge machine, in which ultra-precision diamond wheel grinding method and WEDG method were combined for microelectrode fabrication. The machine consisted of a CCD online dimensional examination system, precision motion and feeding system, nanosecond-pulse independent discharged power supply and gap state-detection system. Experimental study on microelectrode, micro nozzle fabrication and microstructure milling were conducted by the machine. Microelectrode with 15 micrometers in diameter and micro hole with 50 micrometers in diameter were done in experiments.

Key words: electrode fabrication, electro discharge machining, micro-EDM(electric discharge machining), WEDG(wire electrical discharge grinding)

摘要：

针对微电极制作的效率问题，提出了一种快速在线微电极加工成形的方法，设计了一种新型卧式微电火花机床。该机床由金刚石砂轮超精密在线电极磨削、线电极电火花在线电极磨削共同完成微米级电极的高效精密制作，该机床组成部分还包括基于CCD的在线光学尺寸检测与测量系统、精密运动与进给系统、纳秒级独立式脉冲放电电源与放电状态检测反馈系统组成。在该机床上进行了微电极制作、微小孔加工以及微电火花铣削等实验，加工出直径为15μm微细轴和直径为50μm微小孔。

关键词: 微电极制作, 放电加工, 微电火花, 线电火花磨削

CLC Number:

TG661

Shu Xiayun, Zhang Honghai. Design and Experimental Investigation on High Efficient Horizontal Micro Electrical Discharge Machine[J]. China Mechanical Engineering, 2014, 25(5): 657-660,668.

舒霞云, 张鸿海. 一种新型卧式微电火花机床的设计与实验研究[J]. 中国机械工程, 2014, 25(5): 657-660,668.

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