A large-scale scanning three-dimensional lens structure was designed for IPC-208B AFM. The step drive system, piezoelectricity scanner and cantilever probe with a control made AFM tip accomplish three-dimensional scanning precisely. This kind of lens body has broken through the restrictions on the scanning range of the piezoelectric ceramic by swatch scanning, the scanning range has been 25mm×25mm. Experiments were carried out on mica and polyamind(PA) samples by the AFM with the designed system, and the experimental results indicate that this three-dimensional drive system can help AFM achieve nano-detection, and the detection resolution of AFM system can get 0.1nm. Furthermore, this design improves maneuverability, efficiency and reduces cost for AFM detection experiments.

atomic force microscope(AFM), nano-detection, lens structure, swatch scanning

设计了一种IPC－208B型原子力显微镜大范围扫描的三维镜体结构,原子力显微镜通过该结构中的步进驱动系统、压电陶瓷扫描器、微悬臂探针及其调节装置共同实现探针针尖的精确位移控制与扫描检测,该镜体采用样本扫描设置突破了压电陶瓷对扫描范围的限制,可使扫描范围达25mm×25mm,采用装配该三维驱动系统的原子力显微镜进行了云母以及聚酰胺检测实验,实验结果表明,所设计的IPC－208B型大范围扫描三维驱动系统检测精度可达到0.1nm,能够实现纳米级检测扫描,该设计提高了AFM检测实验的可操作性和效率,降低了实验成本。