China Mechanical Engineering ›› 2013, Vol. 24 ›› Issue (09): 1264-1272.
Previous Articles Next Articles
Huang Qiangxian;Yu Huijuan;Huang Shuai;Qian Jianzhao
Online:
2013-05-10
Published:
2013-05-16
Supported by:
黄强先;余惠娟;黄帅;钱剑钊
基金资助:
CLC Number:
HUANG Jiang-Xian, TU Hui-Juan, HUANG Shuai, JIAN Jian-Zhao. Advances in Probes of Micro-nano Coordinating Measuring Machine[J]. China Mechanical Engineering, 2013, 24(09): 1264-1272.
黄强先, 余惠娟, 黄帅, 钱剑钊. 微纳米三坐标测量机测头的研究进展[J]. 中国机械工程, 2013, 24(09): 1264-1272.
[1]蒋庄德,王海容,王朝晖.纳米测量技术与微型智能仪器[J].中国机械工程,2000,11(3):248-251. Jiang Zhuangde, Wang Hairong, Wang Zhaohui. Nanometer Measurement and Micro Interlligent Instrument[J]. China Mechanical Engineering, 2000, 11(3): 248-241. [2]徐毅,高思田,王春艳,等.微机械及纳米计量科学[J].中国机械工程,2000,11(3):272-274. Xu Yi, Gao Sitian, Wang Chunyan, et al. Micro-Michinary and Nanometrology[J]. China Mechanical Engineering, 2000, 11(3): 272-274. [3]徐滨士,欧忠文,马世宁,等.纳米表面工程[J].中国机械工程,2000,11(6):707-712. Xu Binshi, Ou Zhongwen, Ma Shining, et al. Nano-surface-engineering[J]. China Mechanical Engineering, 2000, 11(6): 707-712. [4]陈英飞.新型数字式原子力显微镜的研制与应用研究[D].杭州:浙江大学,2005. [5]Muralikrishnan B, Stone J A, Stoup J R, et al. Fiber Deflection Probe for Small Hole Measurements[C]//American Society for Precision Engineering. Proceedings of the ASPE Annual Meeting. North Carolina:ASPE, 2004:24-27. [6]Muralikrishnan B, Stone J, Stoup J. Measuring Internal Geometry of Fiber Ferrules[C]//Society for Manufacturing Engineers. Proceedings of MicroManufacturing Conference 2005. Michigan: SME, 2005. [7]Schwenke H, Waldele F, Weiskirch C, et al. Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines[J]. Annals of the CIRP, 2001, 50(1): 361-364. [8]Brand U, Kleine-Besten T, Schwenke H. Development of a Special CMM for Dimensional Metrology on Microsystem Components[C]//American Society for Precision Engineering. Proceedings of the 15th Annual Meeting of the ASPE. North Carolina:ASPE,2000: 542-546. [9]Thelen R, Schulz J, Meyer P, et al. Approaching a Sub-Micron Capability Index Using a Werth Fibre Probe System WFP[C]//European Metrology Centre. 4M 2008:Proc. of 4th International Conference on Multi-Material Micro Manufacture. Dunbeath: Whittles Publ., 2008:147-150. [10]Peggs G N, Lewis A J, Oldfield S. Design for a Compact High-accuracy CMM[J]. Annals of the CIRP, 1999, 48(1): 417-420. [11]Leach R K, Murphy J. The Design of Co-ordinate Measuring Probe for Characterising Truly Three-Dimensional Micro-Structures[C]//European Society for Precision Engineering and Nanotechnology. Proceedings of the 4th EUSPEN International Conference. Cranfield: Cranfield University, 2004: 230-231. [12]Claverley J D, Leach R K. A Vibrating Micro-Scale CMM Probe for Measuring High Aspect Ratio Structures[J]. Microsyst Technol, 2010, 16(8/9): 1507-1512. [13]Fujiwara M, Yamaguchi A, Takamasu K. Evaluation of Stages of Nano-CMM[M].Netherlands: Kluwer Academic Publishers, 2001. [14]Van Vlief W P, Schellekens P H J. Accuracy Limitations of Fast Mechanical Probing[J]. Annals of the CIRP, 1996, 45(1): 483-487. [15]Vermeulen M M P A, Rosielle P C J N, Schellekens P H J. Design of a High-Precision 3D-Coordinate Measuring Machine[J]. Annals of the CIRP, 1998, 47(1): 447-450. [16]Haitjema H, Pril W O, Schellekens P H J. Development of a Silicon-based Nanoprobe System for 3-D Measurements[J]. Annals of the CIRP, 2001, 50(1): 365-368. [17]Pril W O. Development of High Precision Mechanincal Probes for Coordinate Measuring Machines[D]. Eindhoven: Technische Universiteit Eindhoven, 2002. [18]王伟丽.纳米三坐标测量机机械结构及接触式测头技术研究[D].合肥:合肥工业大学,2008. [19]陈叶金.创新型微纳米测量探头机理的研究[D].合肥:合肥工业大学,2007. [20]Fan K C, Fei Y T, Yu X F, et al. Development of a Low-cost Micro-CMM for 3D Micro/Nano Measurements[J]. Measurement Science and Technology, 2006, 17(3): 524-532. [21]Chen Y J, Fan K C, Liu Y S, et al. A High Precision Focus Probe for the Quality Assessment of Grating Pitches[J]. Key Engineering Materials, 2007, 339(200): 200-205. [22]Fan K C, Cheng F, Chen Y J, et al. Probe Technologies for Micro/Nano Measurements[C]// Institute of Electrical and Electronics Engineers. Proceedings of the 7th IEEE International Conference on Nanotechnology. New York: IEEE, 2007: 989-993. [23]Chen Fang, Fei Yetai, Fan Kuangchao, et al. Measurement of Pretravel Distance of Nano-CMM Probe[J]. Nanotechnology and Precision Engineering, 2010, 8(2): 123-127. [24]Huang Qiangxian, Hatsuzawa T. A Novel Tapping-mode Stylus with a Polyvinylidene Fluoride Unimorph Sensor[J]. Measurement Science and Technology, 2004, 15(3): 520-528. [25]黄强先,高桥健,初泽毅.表面轮廓测定用扫描探针测头研究[J].机械工程学报,2005,41(8):213-217. Huang Qiangxian,Gao Qiaojian,Chu Zeyi. Study on Scanning Probe Styluses for Surface Profile Measurement[J]. Chinese Journal of Mechanical Engineering, 2005, 41(8): 213-217. [26]黄强先.压电微音叉扫描探针显微镜测头研究[J].仪器仪表学报,2007,28(1):74-79. Huang Qiangxian. Research on a Piezo-electrical Micro-folk Probe for SPM[J]. Chinese Journal of Scientific Instrument, 2007, 28(1): 74-79. [27]侯茂盛,黄强先,杨朋桢.基于聚偏氟乙烯(PVDF)薄膜的新型SPM测头结构及性能研究[J].工具技术,2009,43(5):95-98. Hou Maosheng, Huang Qiangxian, Yang Pengzhen. Study on the Structure and Performance of a New SPM Stylus Fabricated by PVDF Film[J]. Tool Engineering, 2009, 43(5): 95-98. [28]张国雄.三坐标测量机的发展趋势[J].中国机械工程,2002,13(1/2):222-227. Zhang Guoxiong. The Development Tendency of Coordinate Measuring Machines[J]. China Mechanical Engineering, 2002, 13(1/2): 222-227. [29]李源,邹子英,傅云霞,等.基于MEMS微触觉测头和纳米测量机的特征尺寸测量[J].传感技术学报,2008,21(12):2097-2100. Li Yuan, Zou Ziying, Fu Yunxia, et al. Dimension Measurement Based on MEMS Micro Tactile Probe and Nanomeasuring Machine[J]. Chinese Journal of Sensors and Actuators, 2008, 21(12): 2097-2100. [30]李源,傅星,谢初南,等.MEMS三维微触觉测头的低频振动测试系统[J].天津大学学报,2009,42(3):273-277. Li Yuan, Fu Xing, Xie Chunan, et al. Low Frequency Vibration Measurement System of MEMS 3D MicroTactile Probe[J]. Journal of Tianjin University, 2009, 42(3): 273-277. [31]张宏伟,张国雄,李真,等.视觉形貌测头在自由曲面测量中的应用[J].中国机械工程,2005,16(8):716-718. Zhang Hongwei, Zhang Guoxiong, Li Zhen, et al. Applications of Vision Probe on Measurement of Free-formed Surface[J]. China Mechanical Engineering, 2005, 16(8): 716-718. [32]石照耀,韦志会.精密测头技术的演变与发展趋势[J].工具技术,2007,41(2):3-8. Shi Zhaoyao, Wei Zhihui. Evolution and Some Trends in Precision Probe Technology[J]. Tool Engineering, 2007, 41(2): 3-8. [33]刘祚时,倪潇娟.三坐标测量机(CMM)的现状和发展趋势[J].机械制造,2004,42(8):32-34. Liu Zuoshi, Ni Xiaojuan. Present State and Developing Trend of Three-coordinate Measuring Machines[J]. Machinery, 2004,42(8): 32-34. [34]IBS Precision Engineering. Triskelion-Ultra Precision Tactile Probe System.[2011-09-05].http://www.ibspe.com/ibs_precision_engineering_uk/ibs_contact_probe_1.html. [35]Spaan H, Donker R, Widdershoven I. Isara 400: Enabling Ultra-precision Coordinate Metrology for Large Parts[C]//International Measurement Federation. Proceedings of the 10th Internanational Symposium on Measurement and Quality Control. New York: Curran Associates, 2010:231-234. [36]Küng A, Meli F, Thalmann R. Ultraprecision Micro-CMM Using a Low Force 3D Touch Probe[J]. Measurement Science and Technology, 2007, 18(2): 319-327. [37]Thomas R K, Thom J H. Metrology, Sensors and Control[M]. Dordrecht: Springer, 2007. [38]Xpress PrecisionEngineering. Gannen XP: Ultra Precision Tactile Scanning.[2011-09-05]. http://www.xpresspe.com/probe2.html. [39]Leach R. Nanometrology for 3D Structures: International Requirements, Roadmapping and Open Questions[R]. Braunschweig: 257th PTB-Seminar of 3D Micro-and Nanometrology-Requirements and Current Developments, 2010. [40]Stark R W. Optical Lever Detection in Higher Eigenmode Dynamic Atomic Force Microscopy[J]. Review of Scientific Instruments, 2004, 75(11): 5053-5055. [41]Bos E J C, Delbressine F L M, Haitjema H. High-accuracy CMM Metrology for Micro Systems[C]//International Measurement Confederation. Proc. of IMEKO ISMQC 2004. Koebenhavn: Institut for Produktion og Ledelse, DTU, 2004:511-522. [42]Takaya Y, Imai K, Ha T, et al. Vibrational Probing Technique for the Nano-CMM Based on Optical Radiation Pressure Control[J]. Annals of the CIRP, 2004, 53(1): 421-424. [43]Michihata M, Takaya Y, Hayashi T. Development of the Nano-Probe System Based on the Laser-Trapping Technique[J]. Annals of the CIRP, 2008, 57(1): 493-496. [44]Michihata M, Nakai D, Hayashi T, et al. Nano-Dimensional Measurement Using Optically Trapped Probe Enhanced by Interferometric Scale[C]//International Measurement Confederation. IMEKO XIX World Congress. New York: Curran Associates, 2009:1929-1934. [45]Mitutoyo. UMAP Vision System Vision/Micro-stylus Measuring System. [2011-09-05].http://www.mitutoyo.com/TerminalMerchandisingGroup.aspx?group=1577. [46]Tayag T J, Kolesar E S, Pitt B D, et al. Optical Fiber Interferometer for Measuring the in Situ Deflection Characteristics of Microelectromechanical Structures[J]. Optical Engineering, 2003, 42(1): 105-111. [47]Renishaw Apply InnovationTM. REVOFive-axis MeasurementSystem. [2012-04-06].http://www.renishaw.com/en/revo-five-axis-measurement-system--10438. [48]Fang F Z, Xu Z W, Dong S, et al.High Aspect Ratio Nanometrology using Carbon Nanotube Probes in Atomic Force Microscopy[J]. Annals of the CIRP, 2007, 56(1): 533-536. [49]Fang F Z, Xu Z W, Zhang G X, et al.Fabrication and Configuration of Carbon Nanotube Probes in Atomic Force Microscopy[J]. Annals of the CIRP, 2009, 58(1): 455-458. [50]Tan J B, Cui J N. Ultraprecision 3D Probing System Based on Spherical Capacitive Plate[J]. Sensors and Actuators A: Physical, 2010, 159(1): 1-6. [51]Matsuoka H, Kasei S, Hinohara M. Development of a Resonance-Based Touch Probe Structured with 2 Parallel Cross-shaped Thin Leaf Springs[J]. Journal of the Society for Precision Engineering, 2002, 68(2): 269-273. [52]Weckenmann A, Estler T, Peggs G, et al. Probing Systems in Dimensional Metrology[J]. Annals of the CIRP, 2004, 53(2): 657-684. [53]Lebrasseaur E, Bourouina T, Pourciel J B, et al. Resonant-type Micro-probe for Vertical Profiler[J]. Monthly Journal of Institute of Industrial Science, 2001, 53(2): 123-126. [54]黄强先,王广红,万耿华,等.基于相位反馈控制的压电微音叉扫描探针显微镜[J].工具技术,2010,4(4):72-75. Huang Qiangxian, Wang Guanghong, Wan Genghua, et al. Scanning Probe Microscoply Using Piezo-elecltrical Micto-folk Based on Phase Feedback Control[J]. Tool Engineering, 2010, 4(4): 72-75. |
[1] | YU Xiaojie1;LI Xudong1;XIE Shejuan1;LI Peng2;WANG Hao2,3;CHEN Zhenmao1. ECT Method for Wire Breakage Defects in Wire Ropes [J]. China Mechanical Engineering, 2019, 30(22): 2757-2763. |
[2] | MENG Jie1;WANG Zhe1;WANG Rongbiao1;KANG Yihua1;QIU Chen2. Method and System of High-speed Magnetic Flux Leakage Detection for Small-diameter Cartridges [J]. China Mechanical Engineering, 2018, 29(24): 2899-2905. |
[3] | PU Haiming;WANG Zhe;KANG Yihua. Sound Beam's Divergence and Focus of Ultrasonic Point Focusing Probes in Spheres [J]. China Mechanical Engineering, 2018, 29(11): 1268-1273. |
[4] | WANG Shenghuai1, 2;XU Fenghua1;CHEN Yurong1;XIE Tiebang2. A Kind of Multi-scale Integration Measurement System for Surface Textures [J]. China Mechanical Engineering, 2018, 29(06): 705-711,719. |
[5] | CHEN Shiping;WANG Zhenzhong;YU Hui;WANG Quanjin. Improved Wavelet Packet Multi Threshold Denoising Method and Its Engineering Applications [J]. China Mechanical Engineering, 2017, 28(20): 2414-2419. |
[6] | Zhang Rui, Liu Shugui, Zhang Xin, Wang Youfu. Design of Probe Structure in CMM System Based on Virtual Light-pen [J]. China Mechanical Engineering, 2016, 27(24): 3317-3325. |
[7] | Zhou Deqiang, Wang Jun, Pan Meng, Li Ke, Su Lei, Hua Chunjian. Mechanism of Defect Detections for Rectangular Differential Probes of Pulsed Eddy Current Testing [J]. China Mechanical Engineering, 2016, 27(22): 3032-3037. |
[8] | Huang Qiangxian, Hu Xiaojuan, Bian Yakui, Mei Jian, Zhang Liansheng, Chen Lijuan. Advances in Sphericity Measurement Technology of Micro Sphere#br# [J]. China Mechanical Engineering, 2016, 27(09): 1271-1277. |
[9] | Yin Shaohui;Peng Jiehong;Tang Kun;Chen Fengjun;Hu Tian. Design and Simulation of Pneumatic Control Probe for Ultra-precision Asphere Measurement [J]. China Mechanical Engineering, 2014, 25(10): 1279-1285. |
[10] | WEI Jin-Feng, HUANG Jiang-Xian, ZHANG Cuo-Feng, CHENG Xiu-Li. SPM System Based on a New-stylus Fabricated by PVDF Membrane [J]. China Mechanical Engineering, 2012, 23(23): 2839-2843. |
[11] | WANG Li-Cheng, HUANG Shen-Da, DING Han. #br# Error Analysis and Compensation for Touch Trigger Probe of On-machine Measurement System [J]. China Mechanical Engineering, 2012, 23(15): 1774-1778. |
[12] | JIANG Xian-Xiang-1, 2, KANG Yi-Hua-2, WU Jian-Bei-2. Research on Aerostatic Probe for Magnetic Flux Leakage Testing for Steel Pipe in High Testing Speed [J]. China Mechanical Engineering, 2012, 23(15): 1792-1795. |
[13] |
ZHANG Mei, BI Ye-Tai, CHENG Li.
Analysis of Influence Factors of CMM Dynamic Effective Diameter
[J]. China Mechanical Engineering, 2010, 21(9): 1018-1021.
|
[14] | Xu Yi;Li Jiangang;Li Zexiang. An Iterative Method of Probe Radius Error Compensation [J]. J4, 2009, 20(09): 0-1133. |
Viewed | ||||||
Full text |
|
|||||
Abstract |
|
|||||