[1]LEE H J, KIM H C, KIM H Y, et al. Optimal Design and Experiment of a Three-axis Out-of-plane Nano Positioning Stage Using a New Compact Bridge-type Displacement Amplifier[J]. Review of Scientific Instruments,2013,84(11):439-446.
[2]卢清华, 吴志伟, 范彦斌,等. 一种低成本微定位平台的设计与仿真[J].中国机械工程,2013,24(5):585-588.
LU Qinghua, WU Zhiwei, FAN Yanbin,et al. Design and Simulation of a Low-cost Micro-positioning Stage[J]. China Mechanical Engineering,2013,24(5):585-588.
[3]POLIT S, DONG J. Development of a High-bandwidth XY Nanopositioning Stage for High-rate Micro-nanomanufacturing [J]. IEEE/ASME Tr-ansactions on Mechatronics,2011,16(4):724-733.
[4]LI Y, HUANG J, TANG H. A Compliant Parallel XY Micromotion Stage with Complete Kinematic Decoupling[J]. IEEE Transactions on Automation Science & Engineering,2012,9(3):538-553.
[5]LI Y, XU Q. Design and Analysis of a Totally Decoupled Flexure-based XY Parallel Micromanipulator[J]. IEEE Transactions on Robotics,2009,25(3):645-657.
[6]LI X, TIAN Y, QIN Y, et al. Design, Identification and Control of a 2-Degree of Freedom Flexure-based Mechanism for Micro/Nano Manipulation[J]. Nano Science and Nanotechnology Letters,2013,5(9):960-967.
[7]YONG Y K, APHALE S S, MOHEIMANI S O R. Design, Identification, and Control of a Flexure-based XY Stage for Fast Nanoscale Positioning [J]. IEEE Transactions on Nanotechnology,2009,8(1):46-54.
[8]TANG H, LI Y. Development and Active Disturbance Rejection Control of a Compliant Micro-/Nano Positioning Piezostage with Dual Mode[J]. IEEE Transactions on Industrial Electronics,2014,61(3):1475-1492.
[9]LI M A, XIE W, LIU B, et al. Design of Micro-positioning Stage with Flexure Hinge[J]. Optics & Precision Engineering,2014,22(2):338-345.
[10]王洪喜, 王艳波, 白朝辉. 平面柔性铰链导向机构刚度分析与实验测试[J]. 西安工业大学学报,2012,32(8):631-635.
WANG Hongxi, WANG Yanbo, BAI Zhaohui. Analyzing and Testing of the Rigidity of Guiding Mechanism Incorporating the Plane Flexure Hinges[J]. Joumal of Xi'an Technological University,2012,32(8):631-635.
[11]冯维明,宋娟. 材料力学[M]. 北京:国防工业出版社,2010:14-24.
FENG Weiming, SONG Juan.Mechamics of Materials[M]. Beijing:National Defense Industry Press,2010:14-24.
[12]任宁, 田国豪, 欧开良, 等.倒圆角直梁型柔性铰链刚度研究[J]. 机械强度,2012(3):366-370.
REN Ning, TIAN Guohao, OU Kailiang,et al. Research on Rigidity of Corner-filleted Flexural Hinges[J]. Journal of Mechanical Strength,2012(3):366-370. |