基于非对称夹持的压电旋转驱动器设计

摘要/Abstract

摘要： 设计了一种新型非对称夹持压电旋转驱动器。通过对称性电信号激励粘贴在基板上的压电晶片，使基板自由端带动质量块非对称地往复摆动，进而产生非对称的惯性驱动力，实现压电旋转驱动器的定向运动。研制了非对称压电惯性旋转驱动器样机，搭建了驱动器的测试系统，对驱动器步长、摩擦力矩、载荷特性等进行了测试。结果表明，驱动器在电压为15V、频率为10Hz、夹持差为3mm时，步长分辨率为1.82μrad，摩擦力矩为2.475N·mm条件下的最大输出载荷为0.122N。

关键词: 压电, 惯性, 驱动器, 非对称

Abstract: A novel piezoelectric inertial rotary actuator was presented herein based on asymmetric clamping mechanism. The actuator can achieve unidirectional rotation movement by the reciprocating swing of the masses to produce asymmetric inertial impact force when the piezoelectric bimorph pasted on the substrate was applied to the symmetric electrical signals. A prototype was fabricated and a series of experiments were conducted to evaluate its performance in terms of angular displacement, friction torque, and load characteristics. The results show that the angular displacement resolution of 1.82μrad is obtained by applied square wave of 15V, frequency of 10Hz under the clamping difference of 3mm and maximum output load is 0.122N under the friction torque of 2.475N·mm.

Key words: piezoelectric, inertial, actuator, asymmetric

中图分类号:

温建明, 程光明, 马继杰, 曾平, 阚君武. 基于非对称夹持的压电旋转驱动器设计[J]. 中国机械工程.

Wen Jianming, Cheng Guangming, Ma Jijie, Zeng Ping, Kan Junwu. Design of Piezoelectric Rotary Actuator Based on Asymmetric Clamping Mechanism[J]. China Mechanical Engineering.

参考文献

[1]于旭东,龙兴武. 机抖激光陀螺压电陶瓷驱动器参数设计[J].仪器仪表学报,2013,34(6): 1428-1433.

Yu Xudong，Long Xingwu. Parameter Design of Piezoelectric Actuator for Dithered Ring Laser Gyroscope [J]. Chinese Journal of Scientific Instrument, 2013, 34(6): 1428-1433.

[2]张栋，张玉林，李现明，等. 扫描电化学显微镜压电工作台的建模与控制[J]. 仪器仪表学报, 2009, 30(12): 2669-2675.

Zhang Dong, Zhang Yulin, Li Xianming, et al. Modeling and Control of SECM Piezo-stage[J]. Chinese Journal of Scientific Instrument, 2009,30(12): 2669-2675.

[3]于志远，姚晓先，宋晓东. 基于柔性铰链的微位移放大机构设计[J].仪器仪表学报,2011,30(9): 1818-1822.

Yu Zhiyuan, Yao Xiaoxian, Song Xiaodong. Design of Micro-displacement Amplifier Based on Flexure Hinges [J]. Chinese Journal of Scientific Instrument, 2011, 30(9): 1818-1822.

[4]Yutaka Yamagata, Toshiro Higuchi. A Micropositioning Device for Precision Automatic Assembly Using Impact Force of Piezoelectric Elements [J]. Proceedings of the IEEE International Conference on Robotics and Automation, 1995, 1: 666-671.

[5]Yasuhiro Okamoto, Ryuichi Yoshida. Development of Linear Actuators Using Piezoelectric Elements [J]. Electronics and Communications in Japan, Part 3, 1998, 81(11): 11-17.

[6]Takeshi Morita,Ryuichi Yoshida, Yasuhiro Okamoto, et al. Three DOF Parallel Link Mechanism Utilizing Smooth Impact Drive Mechanism[J]. Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology, 2002, 26: 289-295.

[7]Takuma Nishimura, HiroshiHosaka, Takeshi Morita. Resonant-type Smooth Impact Drive Mechanism(SIDM) Actuator Using a Bolt-clamped Langevin Transducer [J]. Ultrasonics,2012, 52(1):75-80.

[8]Paik Dong-Soo, Yoo Kyoung-Ho, Kang Chong-Yun. Multilayer Piezoelectric Linear Ultrasonic Motor for Camera Module [J]. J Electroceram.2009,22(1/3):346-351.

[9]Sharp S L, Paine J S N, Blotter J D. Design of a Linear Ultrasonic Piezoelectric Motor[J]. Journal of Intelligent Material Systems & Structures, 2010, 21(21):961-973.

[10]Martin piller, Zdeněk Hurák. Hybrid Charge Control for Stick-slip Piezoelectric Actuators[J]. Mechatronics, 2011, 21(1): 100-108.

[11]Yang Chia-Feng, Jeng Shyr-Long, Chieng Wei-Hua. Motion Behavior of Triangular Waveform Excitation Input in an Operating Impact Drive Mechanism[J]. Sensors and Actuators A, 2011, 116(1): 66-77.

[12]李勇. 蠕动式压电/电致伸缩微进给定位机构的研究进展[J]. 中国机械工程,1999,10(12):1410-1414.

Li Yong. Research of Inchworm Type of Piezoelectric/electrostriction Micro Feed and Positioning Mechanisms [J]. China Mechanical Engineering, 1999,10(12):1410-1414.

[13]刘向锋,刘大伟,高志,等. 新型压电旋转驱动器的设计与试验研究[J].机械工程学报, 2010,46(1):169-174.

Liu Xiangfeng, Liu Dawei, Gao Zhi, et al. Design and Experimental Research of a New Type of Piezoelectric Rotary Actuator[J]. Journey of Mechanical Engineering, 2010,46(1): 169-174.

[14]刘品宽,温志杰,孙立宁.压电双层膜驱动管内移动微小型机器人的研究[J].科学通报,2009,54(15) 2257-2263.

Liu Pinkuan, Wen Zhijie, Sun Lining. Study on Piezoelectric Bimorph Actuation of the in Pipe Microrobot [J]. Chinese Science Bulletin, 2009,54(15):2257-2263.

[15]姜楠, 刘俊标. 旋转型压电惯性冲击马达的工作特性[J].光学精密工程,2009,17(2):350-355.

Jiang Nan, Liu Junbiao. Operating Characteristic of Rotary Piezo Impact Drive Mechanism[J]. Optics and Precision Engineering, 2009,17(2):350-355.

[16]杜启亮,张勤,田联房, 等. 压电陶瓷驱动微小型机器人的运动分析与仿真[J]. 西南交通大学学报,2011,46(3):415- 421

Du Qiliang, Zhang Qin,Tian Lianfang, et al. Locomotion Analysis and Simulation of Piezo-driven Miniature Robot[J]. Journey of Southwest Jiaotong University, 2011,46(3):415-421.

[17]莫岳平,靳宏, 赵夙, 等. 一种新型压电超声直线电机的研究[J].微电机,2011,44(8):11-13.

Mo Yueping, Jin Hong, Zhao Su, et al. Study on a New Kind Piezoelectric Ultrasonic Linear Motor [J]. Micoromotors,2011,44(8):11-13.

[18]温建明,马继杰,程光明,等. 平面三自由度惯性压电叠堆移动机构研究[J]. 中国机械工程, 2010,21(18):2172-2175.

Wen Jianming, Ma Jijie, Cheng Guangming, et al. Research on Planar 3-DOF Inertial Piezoelectric Stack Moving Mechanisms [J]. China Mechanical Engineering, 2010,21(18):2172-2175.

[19]温建明, 马继杰, 曾平, 等. 压电旋转驱动器制作及性能测试[J]. 光学精密工程,2013,21(1):131-136.

Wen Jianming, Ma Jijie, Zeng Ping, et al. Machining and Functional Testing of Piezoelectric Rotary Actuator [J]. Optics and Precision Engineering, 2013,21(1):131-136.

[20]Vetrov A A, Volkonskii V B, Svistunov D V. Calculation, Fabrication, and Study of Waveguides for an Integrated-optics Gyroscope [J]. J. Opt. Technol., 1999,66: 428-433.