MOEMS阿达玛变换光谱仪的可动光栅光开关阵列

中国机械工程 ›› 2013, Vol. 24 ›› Issue (11): 1489-1493.

MOEMS阿达玛变换光谱仪的可动光栅光开关阵列

岳秋琴1;张智海2;余华2

1.重庆电子工程职业学院,重庆,401331
2.重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆,400044

出版日期:2013-06-10 发布日期:2013-06-04
基金资助:
国家自然科学基金资助项目(61074177)
National Natural Science Foundation of China（No. 61074177）

Line Array of Grating Moving Light Modulators for MOEMS Hadamard Transform Spectrometer

Yue Qiuqin1;Zhang Zhihai2;Yu Hua2

1.Chongqing College of Electronic Engineering,Chongqing,401331
2.National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology,Chongqing University,Chongqing,400044

Online:2013-06-10 Published:2013-06-04
Supported by:
National Natural Science Foundation of China（No. 61074177）

摘要/Abstract

摘要：

根据微弱光谱信号的快速检测原理,构建了一种适用于阿达玛变换光谱仪的MOEMS(微光机电系统)可动光栅光开关阵列。对一种适用于补偿光栅光调制器件加工误差的阿达玛变换算法进行了分析,设计了以Al膜为主的表面微加工工艺流程,制作出MOEMS可动光栅光开关阵列。实验测试结果表明,可动光栅光开关阵列可以在低至8.1V的电压下进行光调制,开关频率达到140Hz,完全可以满足阿达玛变换光谱仪调制速度快、光谱范围宽、机械磨损小和误差小等要求。

关键词: 阿达玛变换光谱仪, 微光机电系统, 可动光栅光开关阵列, 误差补偿算法

Abstract:

According to the faint light signal fast detection in HT(Hadamard transform) spectrometer, a line array of grating moving light modulators made by MOEMS technology was proposed. The paper presented a novel HT error compensation algorithm. After the fabrication process of GMLM(grating moving light modulator) was designed based on the Al film micromachining technology, the line array device was manufactured in lab. Experimental results indicate that GMLM can work well under power supply voltage of 8.1V, and the switch frequency can reach up to 140Hz, which can satisfy the HT spectrometer requirements of fast modulation, wide spectrum, minor abrasion and errors.

Key words: Hadamard transform spectrometer, micro-opto-electro-mechanical systems(MOEMS), line array of grating moving light modulators, error compensation algorithm

中图分类号:

TH744

岳秋琴1, 张智海2, 余华2. MOEMS阿达玛变换光谱仪的可动光栅光开关阵列[J]. 中国机械工程, 2013, 24(11): 1489-1493.

YUE Qiu-Qin-1, ZHANG Zhi-Hai-2, TU Hua-2. Line Array of Grating Moving Light Modulators for MOEMS Hadamard Transform Spectrometer[J]. China Mechanical Engineering, 2013, 24(11): 1489-1493.

参考文献

[1]Streeter L, Burling-Claridge G R, Cree M J, et al. Optical Full Hadamard Matrix Multiplexing and Noise Effects[J]. Applied Optics, 2009, 48(11): 2078-2085.
[2]唐宏武,周锦松,李涛,等.阿达玛变换光谱和成像技术的应用和研究进展[J].分析化学,2005,33(3):417-422.
Tang Hongwu, Zhou Jinsong, Li Tao, et al. The Applications and Advances of Hadamard Transform Spectroscopy and Imaging[J].Chinese Journal of Analytical Chemistry, 2005,33(3):417-422.
[3]虞益挺,苑伟政.MEMS微型可编程光栅的研究现状（下）[J].仪器仪表学报,2008,29(6):1339-1344.
Yu Yiting, Yuan Weizheng. Review of MEMS-based Programmable Gratings: Part Ⅱ[J]. Chinese Journal of Scientific Instrument, 2008,29(6):1339-1344.
[4]莫祥霞,温志渝,张智海,等.MOEMS微镜面阵光谱仪的优化设计与实验[J].光谱学与光谱分析,2011,31(12):3412-3416.
Mo Xiangxia, Wen Zhiyu, Zhang Zhihai, et al. Optimizing Design and Experiment for a MOEMS Micro-Mirror Spectrometer[J]. Spectroscopy and Spectral Analysis, 2011,31(12):3412-3416.
[5]陈小来,胡炳樑,钱情明,等.哈达玛变换光谱仪压缩系统研究[J].电子设计工程，2012,20(3):178-180.
Chen Xiaolai，Hu Bingliang，Qian Qingming，et al. Compression System for Hadamard Transform Spectral Imager[J]. Electronic Design Engineering, 2012,20(3):178-180.
[6]Xiong J, Dyer R A, Dyer S A. A Model for Incorporating the Effects of Nonzero Switching-time Constants in Electro Optic Masks Used in Hadamard Transform Spectrometry[J]. IEEE Transactions on Instrumentation and Measurement, 1996, 45(4):800-804.
[7]Harwit M, Sloane N J A. Hadamard Transform Optics[M]. New York: Academic Press, 1979.
[8]张智海,黄尚廉,张洁,等.MOEMS光栅平动式光调制器的吸合电压分析与实验[J].仪器仪表学报, 2009,30(7):1368-1372.
Zhang Zhihai, Huang Shanglian, Zhang Jie, et al. Analysis and Measurement of Pull-in Voltage of Grating Moving Light Modulator Based on MOEMS[J]. Chinese Journal of Scientific Instrument, 2009,30(7):1368-1372.
[9]张智海,莫祥霞,郭媛君,等.微型MOEMS阿达玛变换近红外光谱仪[J].光谱学与光谱分析,2011,31(7):1975-1979.
Zhang Zhihai, Mo Xiangxia, Guo Yuanjun, et al. Micro Hadamard Transform Near-Infrared Spectrometer[J]. Spectroscopy and Spectral Analysis, 2011,31(7):1975-1979.