关键词: 化学气相沉积碳化硅, 在线电解修整镜面磨削, 磁流变光整加工, 超精密加工, 形状精度, 表面粗糙度

Abstract:

A new ultra-precision synergistic process integrated electrolytic in-process dressing (ELID) grinding and magnetorheological finishing (MRF) was applied to nano-precision finishing for CVD-SiC. ELID grinding, as pre-finishing, was employed to shape rapidly, and obtain a relatively good surface smoothness and form accuracy in high efficiency. Furthermore, MRF, as the final finishing, was used to decrease sub-surface damage and improve form accuracy. Several sets of plane finishing experiments for CVD-SiC have been performed, and micro-surface roughness Rq=2.4nm and from accuracy 21.2nm have been obtained. Furthermore, characteristics of the generated surface resulting from ELID grinding & magneto-rheological finishing were compared and analyzed.

Key words: CVD-SiC, ELID, magnetorheological finishing, ultra-precision process, form accuracy, surface roughness