中国机械工程 ›› 2007, Vol. 18 ›› Issue (21): 2524-2527.

• 机械基础工程 • 上一篇    下一篇

光刻机主基板的动态特性分析及优化

陈学东1;郭合忠1;严天宏2;余显忠1   

  • 收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2007-11-10 发布日期:2007-11-10

Dynamics Analysis of the Main-plate of Stepping-scanning Lithography and Optimization

Chen Xuedong1;Guo Hezhong1;Yan Tianhong2;Yu Xianzhong1   

  • Received:1900-01-01 Revised:1900-01-01 Online:2007-11-10 Published:2007-11-10

摘要:

利用有限元分析理论和模态分析理论,分析了高分辨光刻机主基板的动态特性,分析结果表明主基板结构设计合理。结合模态试验,验证了主基板有限元模型的正确性。利用该有限元模型,进行了灵敏度分析,还进一步实现了主基板结构的优化设计。

关键词: 主基板, 有限元分析, 模态试验, 优化设计

Abstract:

The main-plate of the high-resolution stepping-scanning lithography was studied. Using the finite element analysis theory and modal analysis theory, dynamic characteristics of the main-plate were analyzed, and it proves the structural design is reasonable. Using modal test, the finite element model was validated. Using the finite element model, we carried out sensitive analysis, and implemented the optimization design.

Key words: main-plate, finite element analysis, modal test, optimization design

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