[1]Irving F, Stowers S. Optical Cleanliness Specifica- tion and Cleanliness Verification[J]. Proc. SHE, 1999,3782: 525-527.
[2]Elson J M. Theory of Rough Surface with an Light Scattering from a lnhomogenous Dielectric Permittivity[J].Phys. Rev. B, 1984, 30:5460 -5480.
[3]Elson J M, Bennett H E, Bennett J M. Scattering from Optical Surfaces[M]//Applied Optics and Optical En- gineering, Vol. VII, ChapterT. Shannon R R, Wyant J C, eds. New York:Academic Press, 1979 : 191-220.
[4]Huard A. Visibility Method to Classify Microscopic Surface Defects for Both Reflection and Transmission Systems[J]. Proc. SPIE, 1985,525:36-42.
[5]Bennett H E, Porteus J O. Relation between Surface Roughness Andspecular Reflectance at Normal Inci- dence[J]. Opt. Soc. Am., 1961, 51:123-129.
[6]Lorincik J, Fine J, Gillen G. The Scanning Scattering Microscope for Surface and Buried Interface Roughness and Defect Imaging[J]. Proc. SHE, 1997, 3141:302- 315.
[7]Cormack R, Johson K M, Zhang L, et al. Optical In- spection of Manufactured Glass Using Adaptive Fourier Filtering[J]. Opt. Eng. ,1988,27(5):358-363.
[8]Dury M, Bloduc R A. Fiberoptic Non--contact Reflec- tance Probe for Detection of Contamination in Pharma- ceuti-- calmixing Vessels [J]. Proc. SHE, 1998, 3583: 167-169.
[9]Bilmes G M, Orizi D J O, Martinez O E, et al. New Method for Real Time Surface Cleanliness Measure- ment[J].Proc. SPIE, 2005, 5856: 980-982.
[10]Hogue P, Smith J C. Development of an Automated Optical Inspection System for Determining Percent Area Coverage for Spacecraft Contamination Control [J]. Proc. SPIE, 2004, 5526: 156-158.
[11]ShiXK, Hua A M, Cheunga E H M, et al. Auto- matic Recognition and Evaluation of Micro--contami- nant Particles on Ultra- smooth Optical Substrates Using Image Analysis Method[J]. Optics and Lasers in Engineering, 2004, 2 : 901-917.
[12]唐一科[1],朱小龙[1],王雪[1],谢志江[1].神光Ⅲ精密光学元件表面广义洁净度检测[J].仪器仪表学报,2009(5):1063-1067. |