中国机械工程 ›› 2021, Vol. 32 ›› Issue (23): 2817-2882.DOI: 10.3969/j.issn.1004-132X.2021.23.005

• 航空航天精密与微细制造技术 • 上一篇    下一篇

激光改性后氮化铝基板的可加工性研究

陈妮;韦佳伟;张鑫磊;李亮;何宁   

  1. 南京航空航天大学直升机传动技术国家级重点实验室,南京,210016
  • 出版日期:2021-12-10 发布日期:2021-12-23
  • 通讯作者: 李亮(通信作者),男,1973年出生,博士、教授、博士研究生导师。研究方向为航空航天零件先进加工技术、微细/纳米加工与制造技术、可持续加工技术。E-mail:liliang@nuaa.edu.cn。
  • 作者简介:陈妮,女,1990年出生,博士、讲师。研究方向为微细刀具设计与制造技术、微细加工、切削加工状态及刀具寿命智能监控技术。E-mail:ni.chen@nuaa.edu.cn。
  • 基金资助:
    国家自然科学基金(51905270,51975288);
    江苏省自然科学基金(BK20180435);
    南京航空航天大学“直升机传动技术重点实验室”开放课题(HTL-0-20G01)

Research on Machinability of Laser Modified AlN Substrates

CHEN Ni;WEI Jiawei;ZHANG Xinlei;LI Liang;HE Ning   

  1. National Key Laboratory of Science and Technology on Helicopter Transmission,Nanjing University of Aeronautics and Astronautics,Nanjing,210016
  • Online:2021-12-10 Published:2021-12-23

摘要: 利用激光改性方法研究了被广泛应用在微电子组件封装中的氮化铝(AlN)陶瓷基板在不同气体环境、激光功率、扫描间隔下的可加工性,通过试验测量了AlN试件表面硬度值和元素含量。试验结果表明:在N2、Ar、O2三种气体环境下,试件表面成分主要为AlN、Al和Al2O3,且显微硬度计测得Ar环境下的熔覆层硬度最低,最有利于后续切削加工。在Ar环境下,随着激光功率的增大和扫描间隔的减小,AlN表面改性后的硬度减小,最小值可达到174.83HV,更易进行切削加工。

关键词: 氮化铝, 气体环境, 激光功率, 扫描间隔, 激光改性

Abstract: The machinability of AlN ceramic substrates widely used in the packaging of microelectronic components were studied by laser modification method under different gas environments, laser powers and scanning intervals. The surface hardnesses and element contents of AlN specimen were measured by tests. The testing results show that under N2, Ar, and O2 gas environments, the surface components of the specimen are mainly AlN, Al and Al2O3, and the hardness of the cladding layers measured by microhardness tester is the lowest under the Ar environment, which is most conducive to the subsequent cutting. Under the Ar environment, with the increase of laser power and the decrease of scanning interval, the hardnesses of AlN surface modification decrease, and the minimum value may reach 174.83HV, making it easier to perform cutting. 

Key words:  , aluminum nitride(AlN), gas environment, laser power, scanning interval, laser modification

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