关键词: 激光诱导向前转移, 脉冲能量, 精密沉积, 微细阵列

Abstract: The experiments on the LIFT of Cu film were carried out through changing pulse energy and defocus distances. The materials transferred on the quartz substrate and the restraint layers were investigated, and the effects of pulse energy and defocus distances were analyzed by the optical microscope and scanning electron microscope. The mechanism of LIFT was discussed based on the experimental results. A transfer dot of about 10 μm is found, and which is much smaller than the focal radius. The transferred materials are found on both of the substrate and the restraint layers, which means that there exists a backward transfer process along with forward transfer. With pulse energy increasing, the materials deposited on the substrate become more scattered, and the distribution of the deposition dots tend to form a ring. When the enlarging focal distances are enlarged, the ring disappears, and the deposition area shrinks below the foal radius. And a micro array was successfully fabricated using the LIFT method.

Key words: laser induced forward transfer(LIFT), pulse energy, precise deposition, micro-array