关键词: 支链嵌套, 残余振动, 输入整形, S形轨迹曲线

Abstract: Aiming at the problems of terminal residual vibration suppression of a 3DOF parallel manipulator with limbs of embedding structures，an active suppression method was proposed based on the classical positive impulse input shaping combined with the optimal Scurve profile. Firstly，using the Lagrange method a rigidflexible coupling dynamics model was built for the parallel manipulator with limbs of embedding structures,which consisted of the rigid rod and the flexible components, and then through the dynamic characteristic analyses, it was confirmed that the influences on the residual vibration most were the low order modal. After that, resonant frequency and damping ratio were obtained through experimental analyses and simulations, and based on the residual attenuation vibration model of the linear secondorder owed damping system that affected by impulse sequence, changing the input signals of the drive through feedforward positive impulse input shape combined with the optimal Scurve profile,so as to achieve active suppression of the terminal residual vibration of the parallel manipulator with limbs of embedding structures. The experimental results show that the chain nested residual vibration attenuation time of the end of the parallel robot is reduced by 14%, the maximum amplitude is reduced by 22%,the positioning accuracy and trajectory precision are improved in the process of high speed and high precision wafer handling.

Key words: limbs of embedding structure, residual vibration, input shaping, Scurve track profile