中国机械工程

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新型并联柔性铰链微动精密平台的研究

李仕华;韩雪艳;马琦翔;李富娟   

  1. 燕山大学河北省并联机器人与机电系统实验室,秦皇岛,066004
  • 出版日期:2016-04-10 发布日期:2016-04-11
  • 基金资助:
    河北省自然科学基金资助项目(E2013203293)

Research on Novel Parallel Micro-motion Precision Platform with Flexible Hinge

Li Shihua;Han Xueyan;Ma Qixiang;Li Fujuan   

  1. Parallel Robot and Mechatronic System Laboratory of Hebei Province,Yanshan University,Qinhuangdao,Hebei,066004
  • Online:2016-04-10 Published:2016-04-11
  • Supported by:

摘要: 基于3-PRC并联机构提出一种由压电陶瓷驱动的新型3-PRC并联微动平台,并进行了构型优化设计;采用矢量法对该平台的位置进行分析,并给出了该平台的理论耦合性误差;采用有限元对其运动解耦性进行了研究。最后制作了实验样机,并进行了实验测试。研究结果表明,该并联微动平台可以实现微米级三维移动,具有较高的精度和良好的运动解耦特性。

关键词: 3-PRC, 并联微动平台, 解耦, 三维移动

Abstract: Based on 3-RPC parallel mechanism, a new 3-PRC parallel micro-motion platform driven by piezoelectric ceramic transducer was put forward and its structure was optimized. The position of the platform was analyzed by using vector method and the theoretical coupling errors of the platform were put out. The motion decoupling characteristics of the platform were researched and analyzed by using the finite element analysis method. At last the prototype was produced and tested. The results show that the parallel micro-platform can achieve three-dimensional movement with high precision and good motion decoupling characteristics in the micron scale.

Key words: 3-PRC, parallel micro-motion platform, decoupling, three-dimensional movement

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