关键词: 激光加工, 射流加工, 复合加工, 激光刻蚀

Abstract:

An experimental device of water jet-assisted laser etching was designed,laser etching technology was combined with a medium-jet erosion processing,and the influences of laser processing parameters and jet processing parameters on the etching capacity and cross section quality of material sample were studied.The results show that the laser processing parameters and jet processing parameters have a decisive impact on the quality of the workpiece,the compound processing technology can remove above 90% melting slags which are produced by the laser processing,and the surface roughness are reduced effectively.The blind holes of  the machined materials have a regular inverted triangle shape.

Key words: laser processing, jet machining, combined machining, laser etching