基于聚偏氟乙烯的扫描探针显微镜系统

中国机械工程 ›› 2012, Vol. 23 ›› Issue (23): 2839-2843.

基于聚偏氟乙烯的扫描探针显微镜系统

魏晋鹏;黄强先;张昔峰;盛秀丽

合肥工业大学,合肥,230009

出版日期:2012-12-10 发布日期:2012-12-21
基金资助:
国家自然科学基金资助项目（50975075）；高等学校博士学科点专项科研基金资助项目（20100111110011）
National Natural Science Foundation of China（No. 50975075）;
Research Fund for the Doctoral Program of Higher Education of China（No. 20100111110011）

SPM System Based on a New-stylus Fabricated by PVDF Membrane

Wei Jinpeng;Huang Qiangxian;Zhang Xifeng;Sheng Xiuli

Hefei University of Technology, Hefei, 230009

Online:2012-12-10 Published:2012-12-21
Supported by:

National Natural Science Foundation of China（No. 50975075）;
Research Fund for the Doctoral Program of Higher Education of China（No. 20100111110011）

摘要/Abstract

摘要：

采用聚偏氟乙烯(PVDF)压电薄膜和压电陶瓷(PZT),并结合由电化学研磨得到的钨探针,研制了一种具有对称结构的新型轻敲模式扫描测头。在该测头中,PVDF压电薄膜作为振动梁,其下方中间位置固定有钨探针,在PZT的驱动下,PVDF和探针处于谐振振动状态,同时,PVDF作为微力传感器检测探针顶端原子与试样表面原子间的作用力。所构建测头结合三维纳米定位台、控制程序等构成了新型扫描探针显微镜系统。介绍了测头的构成、工作原理、特性以及SPM系统的整体结构、测量原理、三维工作台的定位控制、信号处理过程和整系统特性测试,并以一维标准光栅为试样进行三维图像扫描,证明了该新型扫描探针显微镜系统的可行性和有效性。

关键词: PVDF振动梁, 钨探针, 定位控制, 扫描探针显微镜

Abstract:

Using PVDF piezoelectric film and PZT-actuators, combined with a tungsten probe derived from electrochemical grinding, a new scanning stylus with a symmetrical structure of tapping mode was developed. In the stylus, PVDF piezoelectric film as a vibrating beam and the tungsten probe fixed below the middle of the beam were in the state of resonance driven by the PZT. At the same time, PVDF film as a micro-force sensor to probe the atomic force between the top of probe and the surface of sample. A new SPM system was constituted from the constructed probe combined with three-dimensional locator and control procedures etc. This paper described such contents as the composition, working principle, characteristics of the stylus, in addition, the overall structure, measuring principle, three-dimensional positioning table control, signal processing and properties of the whole system test of the SPM system were also described, and three-dimensional image scanning was completed by taking a standard one-dimensional raster as the specimen, and the feasibility and effectiveness of the new SPM system were proved.

Key words: PVDF(polyvinilidene fluoride) vibrating beam, tungsten tip, positioning control, scanning probe microscopy(SPM)

中图分类号:

TH71
TH89

魏晋鹏, 黄强先, 张昔峰, 盛秀丽. 基于聚偏氟乙烯的扫描探针显微镜系统[J]. 中国机械工程, 2012, 23(23): 2839-2843.

WEI Jin-Feng, HUANG Jiang-Xian, ZHANG Cuo-Feng, CHENG Xiu-Li. SPM System Based on a New-stylus Fabricated by PVDF Membrane[J]. China Mechanical Engineering, 2012, 23(23): 2839-2843.

[1]	杨洪涛, 章刘沙, 费业泰, 彭东林. 寄生式时栅传感器测量不确定度的分析与评定[J]. 中国机械工程, 2016, 27(18): 2487-2493.
[2]	杨继森, 张静, 江中伟, 李小雨. 时栅位移传感器的动态特性研究[J]. 中国机械工程, 2016, 27(13): 1790-1795.
[3]	黄强先, 胡小娟, 卞亚魁, 梅腱, 张连生, 陈丽娟. 微球球度测量技术的研究进展[J]. 中国机械工程, 2016, 27(09): 1271-1277.
[4]	李志渤;黄强先;赵剑;尤焕杰;程真英. 接触测量中的微探球力变形研究[J]. 中国机械工程, 2014, 25(14): 1926-1929.
[5]	邵东升;余晓芬;孟凡良;胡进忠. 关节轴承球面尺寸检测仪的误差修正方法[J]. 中国机械工程, 2014, 25(13): 1734-1738.
[6]	黄强先, 余惠娟, 黄帅, 钱剑钊. 微纳米三坐标测量机测头的研究进展[J]. 中国机械工程, 2013, 24(09): 1264-1272.
[7]	黄强先, 袁丹, 尤焕杰. 用计量型AFM对一维纳米基准栅的标定及不确定度估计 [J]. 中国机械工程, 2012, 23(5): 531-536.
[8]	陆艺, 曲颖, 罗哉, 孔明. 坐标测量机动态误差补偿的分析与建模 [J]. 中国机械工程, 2011, 22(2): 144-148.
[9]	姚江伟, 张国雄, 裘祖荣, 胡文川, 李杏华. 基于公共光学基准的大尺寸空间角度测量误差研究 [J]. 中国机械工程, 2010, 21(14): 1718-1721.
[10]	姚江伟, 张国雄, 裘祖荣, 胡文川. 基于公共光学基准的大尺寸空间角度测量关键技术 [J]. 中国机械工程, 2010, 21(12): 1473-1476.
[11]	王凤伟;张;辉;邓善熙;曾汉平;. 差压式气针传感器的误差研究[J]. J4, 2009, 20(13): 0-1637.
[12]	周兴林, 于战果, 郑义忠, . 小深孔内径电容式测量方法的研究[J]. 中国机械工程, 2007, 18(21): 2535-2538.