微纳牛级力检测的球膜敏感元件力学分析

中国机械工程 ›› 2012, Vol. 23 ›› Issue (16): 1978-1981.

微纳牛级力检测的球膜敏感元件力学分析

卢占毫;陆永华

南京航空航天大学,南京,210016

出版日期:2012-08-25 发布日期:2017-05-27
基金资助:
国家自然科学基金资助项目(51005122);南京航空航天大学基本科研业务费专项科研项目(Y1034-053);航空科学基金资助项目(2008ZE52049)
National Natural Science Foundation of China（No. 51005122）;
Aviation Science Foundation of China（No. 2008ZE52049）

Mechanics Analysis of Spherical Film Sensitive Component Based on Nano-Newton Force Detection

Lu Zhanhao;Lu Yonghua

Nanjing University of Aeronautics and Astronautics,Nanjing,210016

Online:2012-08-25 Published:2017-05-27
Supported by:

National Natural Science Foundation of China（No. 51005122）;
Aviation Science Foundation of China（No. 2008ZE52049）

摘要/Abstract

摘要：

为了实现工业技术领域的微纳牛级力大小的精确测量,以厚度约700nm、直径50mm左右的球形薄膜为敏感元件,将微纳牛级待测微粒置于球膜上,根据球膜变形量得出被测微粒的重力大小;利用ANSYS建立球形薄膜的力学模型,根据正交试验法设计试验工况,对球膜进行多种工况的受力分析;采用奇异值分解的最小二乘拟合算法处理试验数据,得出变形量、球膜参数以及微粒子重力之间的拟合公式;将拟合公式计算出的变形量理论值与对应试验值进行比较,结果表明:载荷在2~10μN范围内,检测误差不超过1%。


关键词: 球膜变形量, 微纳牛级力, 球膜直径, 球膜厚度

Abstract:

In order to realize the precise measurement of the nN-level micro-force in the industrial technological field,a kind of spherical film,with about 700nm thick and around 50mm in diameter,was used as sensitive component.Distort will be formed when nN-level particles were put on the spherical film.According to the deformation of spherical film,we can get the gravity of the particle.By using the ANSYS software,a mechanics model of the spherical film was built.Adopting the orthogonal experimental method to design some experimental situations,then mechanics analysis of the spherical film was processed in these situations.
And then the experimental results were manipulated by using the least square fitting algorithm that was based on the singular value decomposition.Furthermore,fitting formula was obtained to describe the relationship of deformation,the parameters of spherical film,and the gravity of particles.Comparing the experimental data from situations and the calculating data from fitting formula,we can conclude that when controlling the force in the range of 2~10μN the detecting error will be less than 1%.

Key words: spherical film deformation, nN-level force, spherical film diameter, spherical film thickness

中图分类号:

TP212.12

卢占毫, 陆永华. 微纳牛级力检测的球膜敏感元件力学分析[J]. 中国机械工程, 2012, 23(16): 1978-1981.

LEI Tie-Hao, LIU Yong-Hua. Mechanics Analysis of Spherical Film Sensitive Component Based on Nano-Newton Force Detection[J]. China Mechanical Engineering, 2012, 23(16): 1978-1981.

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