超声电机, 控制系统, 精密定位平台, PID控制

A rod shape rotary ultrasonic motor utilizing the first bending vibration mode was provided,which was composed of one stator and two rotors. The motor

was applied for the actuator of a precision positioning stage. A control system for the

 stage was designed based on computer and GO-400 motion controller. The motor was driven by an ultrasonic motor driver. When the applied voltage to one electric port was fixed at 15V, the motor speed without load was 206r/min and the maximum load torque was 0.273N·m. It is confirmed that the ultrasonic motor is suitable for achieving precise positioning of the stage with forward/reverse control and speed PID control. It is proved by experimental results that the positioning errors of the stage is less than 2μm and forward/reverse displacement resolutions of 1μm are achieved. The precision positioning stage driven by rotary type ultrasonic motors can use rotary optical encoders instead of expensive linear optical encoders. Thus, the price of precision positioning system can be significantly reduced. 

ultrasonic motor, control system, precision positioning stage, PID control