平面宏微驱动系统微动台的刚度计算

中国机械工程 ›› 2011, Vol. 22 ›› Issue (1): 88-91.

平面宏微驱动系统微动台的刚度计算

刘定强;黄玉美;谢礼;杨勇

西安理工大学,西安,710048

出版日期:2011-01-10 发布日期:2011-01-17
基金资助:
国家自然科学基金资助项目(50875209)；国家重点基础研究发展计划(973计划)资助项目(2009CB724406)
National Natural Science Foundation of China（No. 50875209）;
National Program on Key Basic Research Project (973 Program)（No. 2009CB724406）

Stiffness Calculation of Micro-feed Table in Macro-micro Dual Drive Plane Load

Liu Dingqiang;Huang Yumei;Xie Li;Yang Yong

Xian University of Technology,Xian,710048

Online:2011-01-10 Published:2011-01-17
Supported by:

National Natural Science Foundation of China（No. 50875209）;
National Program on Key Basic Research Project (973 Program)（No. 2009CB724406）

摘要/Abstract

摘要：

针对宏微进给系统,利用弹性铰的微变形原理设计了宏微系统中的微动台。采用最小位能原理推导出一般弹性铰的二维刚度矩阵;

并将此刚度矩阵应用于设计有弹性铰的微进给平台中,给出了所设计的微动台简化的计算模型。将简化模型计算结果与有限元计算结果和实验结果比较，结果证明了该方法的有效性和实用性。

关键词:

弹性铰, 微动台, 刚度矩阵, 最小位能原理

Abstract:

For the system of macro micro-feed table,a micro-feed table in macro-micro dual system was designed by using of flexure hinge. The 2D stiffness matrix

was derived from principle of minimum potential. And the stiffness matrix was applied to micro-feed table which contained flexure hinges. A simplified computation model of the micro-feed table was obtained. The results of simplified model were compared with finite element model and laboratory results. The effectiveness and practicality of the method were tested and verified.

Key words:

flexure hinge, micro-feed table, stiffness matrix, principle of minimum potential

中图分类号:

TH703

刘定强, 黄玉美, 谢礼, 杨勇.

平面宏微驱动系统微动台的刚度计算

[J]. 中国机械工程, 2011, 22(1): 88-91.

LIU Ding-Jiang, HUANG Yu-Mei, XIE Li, YANG Yong.

Stiffness Calculation of Micro-feed Table in Macro-micro Dual Drive Plane Load

[J]. China Mechanical Engineering, 2011, 22(1): 88-91.

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