压力传感器集成恒流源灵敏度温度系数补偿

中国机械工程 ›› 2010, Vol. 21 ›› Issue (7): 800-803.

压力传感器集成恒流源灵敏度温度系数补偿

郑蓓蓉;薛伟;周晨;张淼

温州大学,温州,323035

出版日期:2010-04-10 发布日期:2010-04-16
基金资助:
浙江省自然科学基金资助项目(Y107746)
Zhejiang Provincial Natural Science Foundation of China（No. Y107746）

Sensitivity Temperature Coefficient Compensation Based on Pressure Sensor Integrated Constant Current

Zheng Beirong;Xue Wei;Zhou Chen;Zhang Miao

Wenzhou University,Wenzhou,Zhejiang,323035

Online:2010-04-10 Published:2010-04-16
Supported by:
Zhejiang Provincial Natural Science Foundation of China（No. Y107746）

摘要/Abstract

摘要：

针对超低量程微型压力传感器和表面微机械加工的多晶硅压力传感器在高精度测试时和宽温区使用时灵敏度温度系数补偿量大的特点,提出应用“集成恒流源网络”来补偿灵敏度温度系数的方法,推导了定量补偿的公式。灵敏度温度漂移补偿实验中,通过温度周期的调节标定,补偿后灵敏度温度系数绝对值容易达到10×10-6/℃～50×10-6/℃满量程输出,从而验证了该方法的可行性和实用性,表明用集成恒流源补偿压阻式压力传感器具有补偿量大、成本低、效果好、精度高、容易集成等优点,在器件制作中有很大的应用前景。

关键词:

压力传感器, 灵敏度温度系数, 集成恒流源, 补偿



Abstract:

For high accuracy and wide temperature range applications,

this paper presented a novel pressure sensitivity temperature coefficient(TCS) compensation

method,using integrated constant current network.A quantitative compensation

formula was introduced in mathematics.During experiments,the absolute value of the compensated

TCS is easy to be 10×10-6/℃~100 ×10-6/℃ by individual adjustment and calibration of each device's temperature compensation.Therefore the feasibility and practicability of this technology were tested.Again,the disadvantages

were discussed after the research of the experimental data and the improvement methods were also given in the designing period.This technology exhibits the great potential practical value. These applications were promoted in the volume production.The operating performances of these pressure sensors using this technology were proved to be reliable. 

Key words: pressure sensor, sensitivity temperature coefficient, integrated constant current, compensation

中图分类号:

TP212.12

郑蓓蓉, 薛伟, 周晨, 张淼.

压力传感器集成恒流源灵敏度温度系数补偿

[J]. 中国机械工程, 2010, 21(7): 800-803.

ZHENG Bei-Rong, XUE Wei, ZHOU Chen, ZHANG Miao.

Sensitivity Temperature Coefficient Compensation Based on Pressure Sensor Integrated Constant Current

[J]. China Mechanical Engineering, 2010, 21(7): 800-803.

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