柔性板簧, 微纳传动平台, 压电陶瓷, 刚度, 有限元分析

A five-degree-of-freedom (5-DOF) nano-transmission platform driven by PZT was developed. The platform utilized micro-displacement magnifying mechanisms to realize great mobile, great rotation, high-precision movement transmission. The basic principles and the DOFs of the nano-transmission platform were analyzed. The kinematic model of the nano-transmission platform was established. The Input/Output characteristics of the nano-transmission platform were obtained. Based on the pseudo-rigid-body (PRB) model and virtual work principle, the translational stiffness along xyz direction and rotational stiffness along x and y direction were derived. The relationships between the parameters of leaf spring and the static stiffness of the nano-transmission platform were analyzed. The characteristics of the translational stiffness and rotational stiffness were obtained. A geometrical model of the nano-transmission platform was established. Simulation results of the nano-transmission platform,in terms of finite element analysis(FEA),show the accuracy of kinematic model and pseudo-rigid-body model.