基于磁流变阻尼固紧器的工作台定位研究

中国机械工程 ›› 2010, Vol. 21 ›› Issue (12): 1477-1480.

基于磁流变阻尼固紧器的工作台定位研究

余晓芬;马文平;程伶俐

合肥工业大学,合肥,230009

出版日期:2010-06-25 发布日期:2010-07-01
基金资助:
国家自然科学基金资助项目(50775063)
National Natural Science Foundation of China（No. 50775063）

Positioning Study of the Working Table Based on MRF Locking Damper

Yu Xiaofen;Ma Wenping;Cheng Lingli

Hefei University of Technology,Hefei,230009

Online:2010-06-25 Published:2010-07-01
Supported by:
National Natural Science Foundation of China（No. 50775063）

摘要/Abstract

摘要：

基于磁流变液制作的X向、Y向磁流变阻尼固紧器,采用新颖的横向卧式结构,解决了传统纵向立式阻尼固紧器磁流变液溢出密封和摩擦初始阻尼力较大的问题。该固紧器具有柔性阻尼和无冲击固紧工作台的双重功能,减弱了传统固紧方法带来的冲击和直线电机驱动引起的振动,并成功应用于纳米三坐标测量机,使工作台在X向、Y向的分辨率达到5nm,定位稳态波动从原来的20nm减小到5nm。

关键词:

磁流变液, 磁流变阻尼固紧器, 柔性阻尼, 无冲击固紧, 纳米三坐标测量机, 纳米定位

Abstract:

A MRF locking damper herein based on MRF adopted novel horizontal structure. It can solve the contradiction between the seal of MRF and the larger initial frictional damping force for the vertical structure. Furthermore it has flexible damping and can lock the working table without impact,which reduces the impact brought by traditional locking method and the vibration caused by the linear electric motor’s driving. It is successfully applied to Nano-CMM and makes sure that the resolution of the working table achieves 5nm in X,Y direction and the positioning steady-state fluctuation is improved to 5nm from primary 20nm. 

Key words: magnetorheological fluid(MRF), MRF locking damper, flexible damping, lock without impact, nano-CMM, nano positioning

中图分类号:

TB383

余晓芬, 马文平, 程伶俐.

基于磁流变阻尼固紧器的工作台定位研究

[J]. 中国机械工程, 2010, 21(12): 1477-1480.

TU Xiao-Fen, MA Wen-Beng, CHENG Ling-Li.

Positioning Study of the Working Table Based on MRF Locking Damper

[J]. China Mechanical Engineering, 2010, 21(12): 1477-1480.

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