基于结构组件库的MEMS概念设计方法

中国机械工程 ›› 2010, Vol. 21 ›› Issue (1): 46-50.

基于结构组件库的MEMS概念设计方法

马炳和;王辉;苑伟政

西北工业大学陕西省微/纳米系统重点实验室，西安,710072

出版日期:2010-01-10 发布日期:2010-01-22
基金资助:
国家自然科学基金资助项目(50775188)；国家863高技术研究发展计划资助项目(2007AA04Z347)
National Natural Science Foundation of China（No. 50775188）;
National High-tech R&D Program of China (863 Program) （No. 2007AA04Z347）

Structural Element Library Based Conceptual Design Methodology of MEMS

Ma Binghe;Wang Hui;Yuan Weizheng

Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi’an, 710072

Online:2010-01-10 Published:2010-01-22
Supported by:

National Natural Science Foundation of China（No. 50775188）;
National High-tech R&D Program of China (863 Program) （No. 2007AA04Z347）

摘要/Abstract

摘要：

提出了一种基于结构组件库的MEMS概念设计方法。给出了结构组件的表征形式，探讨了基于功能分解的结构组件模型获取方法，借以形成支持概念设计的结构组件模型库。阐明了MEMS概念设计时如何通过行为匹配自动检索出相关组件及其行为链组合、通过对行为链组合进行功能结构细化获得备选的器件方案。结合航空及空气动力学领域急需的MEMS微型剪应力传感器实例对该概念设计方法进行了阐述。研究表明，该方法对于提高MEMS概念设计效率及方案创新能力、促进MEMS概念设计工具化有积极作用。

关键词:

MEMS概念设计, 结构组件, 功能分解, 行为匹配, 剪应力传感器

Abstract:

A new methodology for MEMS conceptual design was introduced to assist the initial stages of design exploration.The methodology utilized past successful MEMS designs and sub-assemblies as building blocks stored in an indexed library. During conceptual design for exploring new MEMS configurations, interrelated elements can be retrieved automatically from the library by behavior matching, and then elements' function and structure of components and the device can be further considered and determined by the designers. Design of shear stress sensor was taken as an example to successfully testify the ability to obtain new designs with high efficiency. 

Key words: MEMS conceptual design, structural element, functional decomposition, behavior match, shear stress sensor

中图分类号:

马炳和, 王辉, 苑伟政.

基于结构组件库的MEMS概念设计方法

[J]. 中国机械工程, 2010, 21(1): 46-50.

MA Bing-He, WANG Hui, YU Wei-Zheng.

Structural Element Library Based Conceptual Design Methodology of MEMS

[J]. China Mechanical Engineering, 2010, 21(1): 46-50.