精密微小内尺度测量技术研究进展

中国机械工程 ›› 2010, Vol. 21 ›› Issue (1): 120-125.

• 学科发展 • 上一篇

精密微小内尺度测量技术研究进展

崔继文;谭久彬;宋传曦

哈尔滨工业大学，哈尔滨,150001

出版日期:2010-01-10 发布日期:2010-01-22
基金资助:
国家自然科学基金资助项目(50705026)；国家863高技术研究发展计划资助项目(2008AA04Z308)
National Natural Science Foundation of China（No. 50705026）;
National High-tech R&D Program of China (863 Program) （No. 2008AA04Z308）

Research Progresses of Precision Measurement Technique for Micro-cavity

Cui Jiwen;Tan Jiubin;Song Chuanxi

Harbin Institute of Technology, Harbin, 150001

Online:2010-01-10 Published:2010-01-22
Supported by:

National Natural Science Foundation of China（No. 50705026）;
National High-tech R&D Program of China (863 Program) （No. 2008AA04Z308）

摘要/Abstract

摘要：

针对微小内尺度的精密测量问题介绍了非接触式、补偿式与瞄准触发式等几种测量新技术。分析了每一种测量技术的测量机理，通过对其结构设计分析得出该技术适用的测量范围，并对其测量性能进行了讨论;重点分析了瞄准触发式测量技术，并对其性能进行了比较。最后对微小内尺度的精密测量发展方向进行了总结。

关键词:

微小内尺度测量, 非接触式测量, 补偿式测量, 瞄准触发测量

Abstract:

Several precision measurement techniques for micro-cavity dimension were presented to solve the problem in the field of cavity precision measurement, including non-contact, compensated, and aiming and triggering measurement techniques. For each technique, the measurement principles were analyzed, the measurement ranges were obtained through the design, and the measurement performance was discussed. Three aiming and triggering measurement techniques using optical fiber were mainly analyzed, and their performance was compared. And lastly the development direction of precision measurement for micro-cavity was generalized.

Key words: precision measurement for micro-cavity, non-contact measurement, compensated measurement, aim and trigger measurement

中图分类号:

TH741.8

崔继文, 谭久彬, 宋传曦.

精密微小内尺度测量技术研究进展

[J]. 中国机械工程, 2010, 21(1): 120-125.

CUI Ji-Wen, TAN Jiu-Ban, SONG Chuan-Xi. Research Progresses of Precision Measurement Technique for Micro-cavity[J]. China Mechanical Engineering, 2010, 21(1): 120-125.

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精密微小内尺度测量技术研究进展

Research Progresses of Precision Measurement Technique for Micro-cavity

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