基于硅模具的Zr基非晶合金微成形工艺研究

中国机械工程 ›› 2010, Vol. 21 ›› Issue (02): 222-225.

基于硅模具的Zr基非晶合金微成形工艺研究

王栋1;廖广兰1;潘;杰3;彭平1;柳林3;史铁林2

1.华中科技大学数字化装备与制造国家重点实验室,武汉,430074

2.武汉光电国家实验室(筹),武汉,430074

3.华中科技大学材料成形与模具技术国家重点实验室,武汉,430074

出版日期:2010-01-25 发布日期:2010-01-28
基金资助:
国家重点基础研究发展计划资助项目(2009CB724204)；国家自然科学基金资助项目(50775091)
National Program on Key Basic Research Project (973 Program)（No. 2009CB724204）;
National Natural Science Foundation of China（No. 50775091）

Study on Micro-forming Process of Zr-based Bulk Metallic Glass with Silicon Mold

Wang Dong1;Liao Guanglan1;Pan Jie3;Peng Ping1;Liu Lin3;Shi Tielin2

1.State Key Laboratory of Digital Manufacturing Equipment and Technology,Huazhong University of Science and Technology,Wuhan,430074

2.Wuhan National Laboratory for Optoelectronics,Wuhan,430074

3.State Key Laboratory of Materials Processing and Mould Technology, Huazhong University of Science and Technology,Wuhan,430074

Online:2010-01-25 Published:2010-01-28
Supported by:

National Program on Key Basic Research Project (973 Program)（No. 2009CB724204）;
National Natural Science Foundation of China（No. 50775091）

摘要/Abstract

摘要：

研究了利用硅模具进行微成形的热压工艺,针对超塑性成形Zr65Cu17.5Al10Ni7.5非晶合金微零件过程进行分析,提出精确去除非晶合金飞边的方法,并采用质量分数为40%的KOH溶液(温度为80℃）腐蚀去除硅模具得到微型零件。利用该工艺成功制备出尺寸精度很高、模数为0.1mm、齿数为20、厚度为300μm的非晶态微型直齿圆柱齿轮。该工艺用于制备高性能非晶合金微型零件优势明显,尤其对于芯部是复杂结构的微型零件更具成形优势。

关键词:

非晶合金, 微成形, 硅模具, 微齿轮

Abstract:

Micro-forming hot embossing process with silicon mold was studied, and superplastic micro-forming of Zr65Cu17.5Al10Ni7.5 bulk metallic glass micro-parts was analyzed. Mechanical grinding was put forward to accurately remove the flashes of bulk metallic glass micro-parts.The micro-parts with silicon mold were then dipped into potassium hydroxide solution at 80℃ to dissolve the mold and obtain the others.The process is utilizd and a good dimensional accuracy for an amorphous micro-spur gear with 0.1 module,20 teeth and 300 micrometers in thickness is obtained.It follows from the results that the technology is promising for manufacturing high-performance complex micro amorphous components especially for those with complex structure in the core.

Key words:

metallic glass, micro-forming, silicon mold, micro-gear

中图分类号:

TB302.5

王栋, 廖广兰, 潘, 杰, 彭平, 柳林, 史铁林.

基于硅模具的Zr基非晶合金微成形工艺研究

[J]. 中国机械工程, 2010, 21(02): 222-225.

WANG Dong, LIAO An-Lan, BO,JIE,BANG Beng, LIU Lin, SHI Tie-Lin.

Study on Micro-forming Process of Zr-based Bulk Metallic Glass with Silicon Mold

[J]. China Mechanical Engineering, 2010, 21(02): 222-225.

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