纳米精度在位测量系统测头误差校正方法

doi:10.3969/j.issn.1004-132X.2022.09.010

中国机械工程 ›› 2022, Vol. 33 ›› Issue (09): 1084-1089.DOI: 10.3969/j.issn.1004-132X.2022.09.010

纳米精度在位测量系统测头误差校正方法

郭曦鹏, 徐闻, 王定文, 李蓉, 尹韶辉

湖南大学国家高效磨削工程技术研究中心, 长沙, 410082

收稿日期:2021-12-28 出版日期:2022-05-10 发布日期:2022-05-17
通讯作者: 尹韶辉(通信作者),男,1967年生,教授、博士研究生导师。研究方向为微纳制造技术、超精密加工、超微细加工、超高速加工。E-mail:yinshaohui@hnu.edu.cn。
作者简介:郭曦鹏,男,1992年生,博士研究生。研究方向为超精密在位测量及误差补偿技术。E-mail:502448186@qq.com。
基金资助:
国家重点研发计划(2017YFE0116900);国家自然科学基金(52130503);湖南省重点研发计划(2020WK2011)

Probe Error Correction Method for Nano-precision On-machine Measurement Systems

GUO Xipeng, XU Wen, WANG Dingwen, LI Rong, YIN Shaohui

National Engineering Research Center for High Efficiency Grinding, Hunan University, Changsha, 410082

Received:2021-12-28 Online:2022-05-10 Published:2022-05-17

摘要/Abstract

摘要： 针对超精密机床两轴联动接触式在位测量过程中测头误差影响测量精度的问题，提出了一种测头半径误差及形状误差校正方法。进行了在位测量实验，比较分析了测头误差未校正、测头半径误差校正及测头形状误差校正三种情况的测量结果，并分别与Taylor Hobson PGI840离线测量结果进行对比，以验证测头形状误差校正方法的有效性。测头形状误差校正后，面形精度PV值由420nm变为370nm，与离线测量PV值380nm的差值为10nm。结果表明，该在位测量系统测头误差校正方法有效，能够提高在位测量精度。

关键词: 超精密机床, 在位测量, 误差校正, 纳米精度

Abstract: Aiming at the problems that the probe errors affected the measurement accuracy in two axis linkage contact on-machine measurement of ultra precision machine tools, a correction method of probe radius errors and shape errors was proposed. On-machine measurement experiments were conducted. Measurement results for three cases of uncorrected probe errors, corrected probe radius errors and corrected probe shape errors were compared with Taylor Hobson PGI840's off-line measurement results, and the effectiveness of the probe shape error correction method was verified. After the correction of probe shape errors, the surface form accuracy PV value changes from 420 nm to 370 nm, which shows a deviation of 10 nm compared with the off-line measurement PV value of 380 nm. Results show that the probe error correction method for on-machine measurement systems is effective, which may improve the on-machine measurement accuracy.

Key words: ultra-precision machine tool, on-machine measurement, error correction, nano-precision

中图分类号:

TH161.2

郭曦鹏, 徐闻, 王定文, 李蓉, 尹韶辉. 纳米精度在位测量系统测头误差校正方法[J]. 中国机械工程, 2022, 33(09): 1084-1089.

GUO Xipeng, XU Wen, WANG Dingwen, LI Rong, YIN Shaohui. Probe Error Correction Method for Nano-precision On-machine Measurement Systems[J]. China Mechanical Engineering, 2022, 33(09): 1084-1089.

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纳米精度在位测量系统测头误差校正方法

Probe Error Correction Method for Nano-precision On-machine Measurement Systems

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