Abstract: In order to study the effects of vibration feed on the flow fields of electrochemical machining， taking the microstructure on the surfaces of the sheets as the research object， the multi-field coupled simulation models of electrochemical machining were established to simulate the electrochemical machining processes of microstructures under the conditions of continuous feed and vibration feed， and the processing tests were carried out to study the influences of vibration feed on the flow fields. The results show that vibration feed coupled with intermittent discharge may ensure that the electrolyte is updated to an initial state with uniform conductivity distribution before the power is turned on. As the increase of the machining depths， the disturbances of the vibration motions to the flow field are weakened， and the bubble distribution along the process tends to be uniform. For the surface microstructure with a processing depth of 0～0.5 mm， the vibration feed motion with an amplitude of 0.3 mm and a frequency of 40 Hz has a better effect on improving the flow field conditions， which is conducive to improve the stability， surface quality and dimensional consistency of the electrochemical machining processes of the small microstructure on the surfaces of the sheets. 

Key words:  , microstructure, precision electrochemical machining, vibratory feed, flow field

摘要： 为研究振动进给对表面小微结构电解加工流场的影响，以薄片表面小微结构为研究对象，建立了电解加工多场耦合仿真模型，对持续进给和振动进给条件下微结构电解加工过程进行仿真，并开展工艺试验，研究了振动进给对流场的影响规律。结果表明，耦合间断放电的振动进给可保证电源开通前电解液更新为电导率分布均匀的初始状态；随着加工深度的增加，振动运动对流场的扰动减弱，而沿程气泡分布趋于均匀；对于加工深度在0～0.5 mm的表面微结构，振幅为0.3 mm、频率为40 Hz的振动进给运动对流场条件改善效果较好，有利于提高薄片表面小微结构电解加工过程稳定性、表面质量以及尺寸一致性。

关键词: 小微结构, 精密电解加工, 振动进给, 流场