Theoretical Analysis and Experimental Research of Grating Mechanical Depicts Process

Abstract

Abstract:

At present, the “test score” processing of grating process model has the characteristics of time-consuming and low efficiency, and grating trough of mechanical characterization can't be precontrolled accurately. The microstructure and mechanical properties of grating score aluminum film were characterized herein through nano-indentation experiments. Formation of trough were studied by using finite element analysis software Deform combined with orthogonal tests. Trough base angle process model was established through study of the range data analysis and the effects of single factor experimental analysis of the data. The results show that, the process can be converted into grating wedge press process, based on the finite element simulation of tank base angle process model is available simultaneously.

Key words: diffraction grating, finite element, orthogonal test, model, process, experiment

摘要：

目前，“试刻划”加工光栅的工艺模式耗时长、效率低，且机械刻划光栅的槽形无法准确预控。通过纳米压痕实验对光栅刻划铝薄膜的微观结构及力学性能进行了表征，采用DEFORM有限元分析软件并结合正交试验对成槽过程进行了研究，通过对数据进行极差分析和单因素影响规律实验分析，建立了槽底角数学工艺模型。研究结果表明，光栅刻划过程可转化为楔体下压过程，基于有限元模拟实验的槽底角数学工艺模型可用。

关键词: 衍射光栅, 有限元, 正交试验, 模型, 工艺, 实验

CLC Number:

TH164

Zhang Baoqing, Shi Guoquan, Shi Guangfeng, Cai Hongbin. Theoretical Analysis and Experimental Research of Grating Mechanical Depicts Process[J]. China Mechanical Engineering, 2014, 25(1): 1-6.

张宝庆, 史国权, 石广丰, 蔡洪彬. 衍射光栅机械刻划工艺理论分析与实验研究[J]. 中国机械工程, 2014, 25(1): 1-6.

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