砷化镓解理加工的划片过程仿真分析及工艺研究
张庆正1, 姜晨1, 高睿2, 蒋金鑫1
Simulation Analysis and Process Study of Scribing Processes for GaAs Cleavage Processing
ZHANG Qingzheng1, JIANG Chen1, GAO Rui2, JIANG Jinxin1
中国机械工程
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2024, (12): 2203
-2210
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DOI: 10.3969/j.issn.1004-132X.2024.12.013
