光纤法珀式SiC耐高温压力传感器的制造与测试
盛天宇, 李健, 李鸿昌, 蒋永刚
Fabrication and Measurement of SiC Fiber-optic Fabry-Perot Pressure Sensors for High-temperature Applications
SHENG Tianyu, LI Jian, LI Hongchang, JIANG Yonggang
中国机械工程
.
2022, (15): 1803
-1809
.
DOI: 10.3969/j.issn.1004-132X.2022.15.006