微机电系统压电振动台迟滞补偿方法研究

郝瑞, 彭倍, 周吴

Research on Hysteresis Compensation Method of MEMS Piezoelectric Vibratory Platforms

HAO Rui, PENG Bei, ZHOW Wu

中国机械工程 . 2021, (17): 2118 -2124 . DOI: 10.3969/j.issn.1004-132X.2021.17.013