典型碳化硅光学材料的超光滑抛光试验研究

康念辉;李圣怡;郑子文;戴一帆;

Experimental Research on Super-smooth Polishing Process of Typical Silicon Carbide Materials

Kang Nianhui;Li Shengyi;Zheng Ziwen;Dai Yifan

J4 . 2008, (21): 0 -2645 .