单晶SiC的电助光催化抛光及去除机理

何艳;苑泽伟;段振云;王雪

Electrical Enhanced Photocatalysis Polishing and Removal Mechanism for Single Crystal SiC

HE Yan;YUAN Zewei;DUAN Zhenyun;WANG Xue

中国机械工程 . 2020, (04): 403 -409 .