化学机械干式研磨的转化率建模及优化试验
袁巨龙1;王洁1,2;吕冰海1;黄晟1;张韬杰1;杭伟1
Modeling and Optimization Experimental Research of Conversion Rates in Chemical Mechanical Dry Lapping
YUAN Julong1;WANG Jie1,2;LYU Binghai1;HUANG Sheng1;ZHANG Taojie1;HANG Wei1
中国机械工程
.
2019, (18): 2185
-2190,2197
.
