基于直流-交变电场的单晶硅3D微纳结构制备方法研究
焦晓东, 巢炎, 吴立群, 姚安琦, 楼洪梁, 李仁旺
Study on Fabrication Method of Silicon 3D Micro-Nanostructure Based on Direct-alternating Electric Field
Jiao Xiaodong, Chao Yan, Wu Liqun, Yao Anqi, Lou Hongliang, Li Renwang
中国机械工程
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2015, (21): 2923
-2928
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