柔性微型阀对静电驱动振膜微泵压力性能的影响

张彧, 王文, 赵小林, 丁桂甫

Effect of Flexible Microvalveson on Pressure Performance of Electrostatically Actuated Micropumps

Zhang Yu, Wang Wen, Zhao Xiaolin, Ding Guifu

中国机械工程 . 2014, (1): 92 -96,102 .