硅三明治型微机械加速度计温度漂移与敏感结构热膨胀关系研究
戴强1，2;苏伟2;张德2;彭勃2;杨林1
Research on Relationship between Temperature Drift and Thermal Expansion of Sensing Structure in Sandwich Micro-accelerometer
Dai Qiang1，2;Su Wei2;Zhang De2;Peng Bo2;Yang Lin1
中国机械工程
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2013, (19): 2602
-2606
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