<div>用计量型AFM对一维纳米基准栅的标定及不确定度估计</div>

黄强先, 袁丹, 尤焕杰

Calibration and Uncertainty Estimation of One-dimensional Reference Grating Using a Metrological Atomic Force Microscope

HUANG Jiang-Xian, YUAN Dan, YOU Huan-Jie

中国机械工程 . 2012, (5): 531 -536 .