<div>一种用于化学机械抛光的加压装置设计研究</div>

王彩玲, 康仁科, 金洙吉

Research and Design on a Device to Apply Down-force in Chemical Mechanical Polishing Process

WANG Cai-Ling, KANG Ren-Ke, JIN Zhu-Ji

中国机械工程 . 2010, (7): 839 -842,864 .