微行程尺度下精密线性平台装配误差解耦与定位精度优化研究
严定伟, 唐皓, 郑煜, 李鹤葶
Research on Decoupling of Assembly Errors and Optimization of Positioning Accuracy for Precision Linear Platforms at Micro-scale
YAN Dingwei, TANG Hao, ZHENG Yu, LI Heting
中国机械工程
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2026, (9): 2268
-2277
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DOI: 10.3969/j.issn.1004-132X.2026.09.019