碳化硅陶瓷超声辅助飞秒激光烧蚀机理与工艺研究
林颖亮, 陈晓晓, 马晨斌, 李奇, 张文武
Study on Ultrasonic-assisted Femtosecond Laser Ablation Mechanism and Process of Silicon Carbide Ceramics
LIN Yingliang, CHEN Xiaoxiao, MA Chenbin, LI Qi, ZHANG Wenwu
中国机械工程
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2026, (8): 2029
-2037
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DOI: 10.3969/j.issn.1004-132X.2026.08.022
