基于复合结构抛光工具的铜衬底线性液动压抛光加工
余虹蛟, 文东辉, 孔凡志, 傅远韬
Linear Hydrodynamic Polishing of Copper Substrates Based on Composite Structure Polishing Tools
YU Hongjiao, WEN Donghui, KONG Fanzhi, FU Yuantao
中国机械工程
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2026, (3): 546
-554
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DOI: 10.3969/j.issn.1004-132X.2026.03.004
