原子及近原子尺度制造——制造技术发展趋势

摘要/Abstract

摘要： 探讨了制造技术发展趋势，论述了制造历史发展的三个阶段，指出原子及近原子尺度制造（ACSM）是下一代制造技术的主流发展趋势，对未来科技发展和高端元件制造具有重要意义。详细分析阐述了ACSM的主要研究内容及关键科学问题，并提出了相应的建议和措施。

关键词: 原子及近原子尺度, 原子及近原子尺度制造, 制造Ⅲ, 制造技术发展趋势

Abstract: This paper present the manufacturing development history, described three phases of advancement in, and indicated the main trend of manufacturing development, namely, ACSM, which would be of great significance in developing future technologies and high-end components manufacturing. The ACSM main issues to be explored were discussed and the relevant suggestions and measures were who provided.

Key words: atomic and close-to-atomic scale； atomic and close-to-atomic scale manufacturing(ACSM), manufacturing Ⅲ, development trend of manufacturing technology

中图分类号:

房丰洲. 原子及近原子尺度制造——制造技术发展趋势[J]. 中国机械工程.

FANG Fengzhou. On Atomic and Close-to-atomic Scale Manufacturing——Development Trend of Manufacturing Technology[J]. China Mechanical Engineering.

参考文献

[1]FANG F Z, ZHANG N, GUO D, et al. Towards Atomic and Close-to-atomic Scale Manufacturing [J]. International Journal of Extreme Manufacturing, 2019, 012001:1-33.

[2]刘元希. 世界上最早的工具制造者[J]. 世界科学, 2004(12):21.

LIU Yuanxi. The Earliest Tool-maker in the World [J]. World Science, 2004(12):21.

[3]HENSHILWOOD C S, DERRICO F, MAREAN C W, et al. An Early Bone Tool Industry from the Middle Stone Age at Blombos Cave, South Africa:Implications for the Origins of Modern Human Behavior, Symbolism and Language [J]. Journal of Human Evolution, 2001, 41(6):631-678.

[4]GLEBA M, MANNERING U. Textiles and Textile Production in Europe from Prehistory to AD 400[M]. Barnsley：Oxbow Books, 2012.

[5]GILES M. Making Metal and Forging Relations:Ironworking in the British Iron Age [J]. Oxford Journal of Archaeology, 2007, 26(4):395-413.

[6]房丰洲, 张效栋. 纳米切削基础理论及相关关键技术研究[J]. 中国科学基金, 2014, 28(5):357-359.

FANG Fengzhou, ZHANG Xiaodong. Fundamental Study and Progress of Nano Cutting [J]. Bulletin of National Natural Science Foundation of China, 2014, 28(5):357-359.

[7]POUNDS N J G. The Culture of the English People:Iron Age to the Industrial Revolution [M]. New York：Cambridge University Press, 1994.

[8]de VRIES J. The Industrial Revolution and the Industrious Revolution [J]. The Journal of Economic History, 1994, 54(2):249-270.

[9]BALASSA B, NOLAND M. Japan in the World Economy[M]. Washington：Peterson Institute for International Economics, 1988.

[10]房丰洲. “工业4.0”不能照搬 ,“制造Ⅲ”：“中国制造”升级的战略选择[J]. 人民论坛, 2015(16):59-61.

FANG Fengzhou.Industry 4.0 Cannot be Copied, Manufacturing Ⅲ Is the Strategic Choice of Manufacturing Upgrading in China [J]. People's Tribune， 2015(16):59-61.

[11]房丰洲. 工业转型升级如何突破：把握新一代制造技术发展方向[N]. 人民日报, 2015-06-30(7).

FANG Fengzhou. Updating the Industrial:Seize the Development Opportunity of New Manufacturing Technology [N]. People's Daily, 2015-06-30(7).

[12]赵欣欣. 中国制造业发展的历史阶段概述[J]. 西部皮革, 2016, 38(10):273.

ZHAO Xinxin. The Historical Phase of Manufacturing Development in China [J].West Leather, 2016, 38(10):273.

[13]杜壮. 智能制造:2.0补课、3.0普及、4.0示范[J]. 中国战略新兴产业, 2015(14):46-48.

DU Zhuang.Intelligent Manufacturing:2.0 Catch-up, 3.0 Dissemination, 4.0 Demonstration [J]. Chinese Strategic New Industry, 2015(14):46-48.

[14]Atoms to Product (A2P) [Z/OL]. [2019-09-12].https:∥www.darpa.mil/program/atoms-to-product.

[15]A2P performers [Z/OL]. [2019-09-12]. http:∥www.darpa.mil/work-with-us/a2p-performers.

[16]GERRER L, LING S, AMOROSO S M, et al. From Atoms to Product Reliability:toward a Generalized Multiscale Simulation Approach [J]. Journal of Computational Electronics, 2013, 12(4):638-650.

[17]RASHIDI M, WOLKOW R A. Autonomous Scanning Probe Microscopy in Situ Tip Conditioning through Machine Learning [J]. ACS Nano, 2018, 12(6):5185-5189.

[18]李沫, 李倩, 张健. 原子制造与原子微系统:A2P与强约束集成微系统技术的结合[J]. 太赫兹科学与电子信息学报, 2016, 14(5):793-799.

LI Mo, LI Qian, ZHANG Jian.Atom Assembly and Atom Microsystem:a Blend of A2P and Strongly Constrained Integrated Microsystem [J]. Journal of Terahertz Science and Electronic Information Technology, 14(5):793-799.

[19]SHAW M C, COOKSON J O. Metal Cutting Principles [M]. New York:Oxford University Press, 2005.

[20]FANG F Z, WU H, LIU Y. Modelling and Experimental Investigation on Nanometric Cutting of Monocrystalline Silicon [J]. International Journal of Machine Tools and Manufacture, 2005, 45(15):1681-1686.

[21]半导体光刻技术及其发展历程[Z/OL]. (2018-11-27 )[2019-09-12].http:∥www.elecfans.com/d/822306.html.

The Development of Semiconductor Lithography [Z/OL]. (2018-11-27 )[2019-09-12]. http:∥www.elecfans.com/d/822306.html.

[22]EUV Lithography[Z/OL]. [2019-09-12].https:∥www.asml.com/en/technology.

[23]在原子尺度上进行精密控制[Z/OL]. [2019-09-12]. https:∥www.lamresearch.com/zh-hans/products/our-processes/.

Precision Control in Atomic Scale [Z/OL]. [2019-09-12].https:∥www.lamresearch.com/zh-hans/products/our-processes/.

[24]JESSE S, BORISEVICH A Y, FOWLKES J D, et al. Directing Matter:toward Atomic-scale 3D Nanofabrication [J]. ACS Nano, 2016, 10(6):5600-5618.

[25]LANDAU L D, LIFSHTZ E M. Quantum Mechanics:Non-relativistic Theory [M]. New York: Elsevier, 2013.

[26]世界上最小的机器[Z/OL]. [2019-09-12]. http:∥www.360doc.com/content/17/0625/20/9824753_666481831.shtml.

The Smallest Machine in the World [Z/OL]. [2019-09-12].http:∥www.360doc.com/content/17/0625/20/9824753_666481831.shtml.

[27]张茜，李萌，龚旗煌，等. 飞秒激光直写光量子逻辑门[J]. 物理学报,2019 68(10):104205.

ZHANG Qian, LI Meng, GONG Qihuang,et al. Femtosecond Laser Direct Writing of Optical Quantum Logic Gates [J]. Acta Physica Sinica， 2019, 68(10):104205.

[28]DEY A ， SUDHAKAR Y. Oxides:an Answer to the Gubit Problem[J]. International Journal of Modern Physics B, 2019, 33:1930003.

[29]SAFFMAN M. Quantum Computing with Atomic Qubits and Rydberg Interactions:Progress and Challenges [J]. Journal of Physics B:Atomic, Molecular and Optical Physics, 2016, 49:202001.

[30]岳文瑾，聂光军，兰阳明，等. 量子点的合成、表面修饰及在聚合物太阳电池中的应用[J].材料导报，2014 ，28(5):53-57.

YUE Wenjin, NIE Guangjun, LAN Yangming, et al. Synthesis, Surface Modification of Quantum Dots and Their Application in Polymer-based Solar Cells [J]. Materials Review, 2014 ，28(5):53-57.

[31]张淋, 高伟, 李倩. 冷原子干涉陀螺仪实现及其性能分析[J]. 仪器仪表学报, 2018，39(7):11-18.

ZHANG Lin, GAO Wei, LI Qian. Realization and Performance Analysis of Gyroscope Based on Cold Atom Interference [J]. Chinese Journal of Scientific Instrument, 2018，39(7):11-18.

[32]邓建辉, 郑孝天. 冷原子干涉陀螺仪发展综述[J]. 光学与光电技术, 2014, 12(5):94-98.

DENG Jianhui, ZHENG Xiaotian.Development of Cold Atom Interferometic Gyroscope [J]. Optics & Optoelectronic Technology, 12(5):94-98.

[33]邹鹏飞, 颜树华, 林存宝, 等. 冷原子干涉陀螺仪在惯性导航领域的研究现状及展望[J]. 现代导航, 2013, 4(4):263-269.

ZOU Pengfei, YANG Shuhua, LIN Cunbao, et al.Research Status and Srospects of Cold Atom Interferometry Gyroscope in Inertial Navigation Fields [J]. Modern Navigation, 2013, 4(4):263-269.

[34]DARPA发布原子-光子集成项目建议征集书，研发非GPS定位导航技术[EB/OL]. (2018-08-03 )[2019-09-12].http:∥www.sohu.com/a/244934098_313834.

DARPA Released the Proposal for Atom-photon Integration Project, Developing Non-GPS Positioning and Navigation Technology [EB/OL]. (2018-08-03 )[2019-09-12].http:∥www.sohu.com/a/244934098_313834.

[35]Defense Advanced Research Projects Agency [Z/OL]. [2019-09-12].https:∥www.darpa.mil/.

[36]周济, 李龙土. 超材料技术及其应用展望[J]. 中国工程科学, 2018, 20(6):77-82.

ZHOU Ji, LI Longtu.Metamaterial Technology and Its Application Prospects [J]. Strategic Study of CAE, 2018, 20(6):77-82.

[37]HAN T , BAI X , THONG J T L , et al. Full Control and Manipulation of Heat Signatures:Cloaking, Camouflage and Thermal Metamaterials [J]. Advanced Materials, 2014, 26(11):1731-1734.

[38]MA H F , CUI T J . Three-dimensional Broadband Ground-plane Cloak Made of Metamaterials [J]. Nature Communications, 2010, 1(3):21.

[39]BUCKMANN T, THIEL M , KADIC M , et al. An Elasto-mechanical Unfeelability Cloak Made of Pentamode Metamaterials [J]. Nature Communications, 2014, 5:4130.

[40]周济, 于相龙. 智能超材料的创新特性与应用前景[J]. 中国工业评论, 2018(8):20-28.

ZHOU Ji, YU Xianglong. The New Characteristic and Application Prospects of Intelligent Metamaterials [J]. China Industry & Information Technology, 2018(8):20-28.

[41]史旭明, 张军, 许仲梓. 隐身材料的研究进展[J]. 材料导报, 2007, 21(增刊1):310-315.

SHI Xuming, ZHANG Jun, XU Zhongzi.Research Review of the Camouflage Materials [J]. Materials Review, 2007, 21(S1):310-315.

[42]田小永, 尹丽仙, 李涤尘. 三维超材料制造技术现状与趋势[J]. 光电工程, 2017, 44(1):69-76.

TIAN Xiaoyong, YIN Lixian, LI Dichen.Current Situation and Trend of Fabrication Technologies for Three-dimensional Metamaterials [J]. Opto-Electronic Engineering, 2017, 44(1):69-76.

[43]梁庆宣, 杨贞, 何锦, 等. 超材料结构增材制造技术及其应用研究进展[J]. 航空制造技术, 2019, 62(1/2):30-37.

LIANG Qingxuan, YANG Zhen, HE Jin, et al. Research Progress of Additive Manufacturing Technology and Its Applications for Metamaterial Structure [J]. Aeronautical Manufacturing Technology, 2019, 62(1/2):30-37.

[44]SOUKOULIS C M , WEGENER M . Past Achievements and Future Challenges in the Development of Three-dimensional Photonic Metamaterials [J]. Nature Photonics, 2011, 5(9):523-530.

[45]于相龙, 周济. 智能超材料研究与进展[J]. 材料工程, 2016, 44(7):119-128.

YU Xianglong, ZHOU Ji.Research Advance in Smart Metamaterials [J]. Journal of Materials Engineering, 2016, 44(7):119-128.