超声微细电铸试验研究

J4 ›› 2008, Vol. 19 ›› Issue (6): 0-750.

• 机械科学 •

超声微细电铸试验研究

明平美1,2;朱荻2;胡洋洋2;曾永彬2

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2008-03-25 发布日期:2008-03-25

Experimental Research on Microelectroforming with Ultrasound Stirring

Ming Pingmei1,2;Zhu Di2;Hu Yangyang2;
Zeng Yongbin2

Received:1900-01-01 Revised:1900-01-01 Online:2008-03-25 Published:2008-03-25

摘要/Abstract

摘要：

试验研究和分析了电解液施加超声搅拌作用时
不同声强对试样形貌质量的影响，优选了工艺参数，在此基础上，进行了超声微结构电铸试验，并制备出多种金属微器件。试验结果表明：超声搅拌声强为12~14W/cm²时，电铸出的镍微器件积瘤、针孔等缺陷少，塌角、圆边现象明显减少，表面平整。微细电铸时，电解液施加适量大小声强的超声搅拌，能显著改善微细电铸器件形貌质量，提高金属充填能力。

关键词: 超声搅拌；微细电铸；微器件；微观形貌

Abstract:

A number of microelectroforming experiments assisted with ultrasound stirring were carried out to verify and revise the optimum processing parameters,and some metal microdevices were produced.Experimental results show that fewer microdefects such as nubbles,pinholes,roundings,and collapses in the microelectroforms and smoother surface are observed when ultrasound stirring with power intensity
12W/cm2~14W/cm² is drawn on. Microelectroforming assisted with ultrasound
stirring at appropriate power intensity is characterized by better topograhpy and better
uniform filling behavior.

Key words: ultrasound stirring;microelectroforming；microdevice；topography

中图分类号:

TM56

明平美;朱荻;胡洋洋;曾永彬;. 超声微细电铸试验研究[J]. J4, 2008, 19(6): 0-750.

Ming Pingmei,;Zhu Di;Hu Yangyang; Zeng Yongbin. Experimental Research on Microelectroforming with Ultrasound Stirring[J]. J4, 2008, 19(6): 0-750.

超声微细电铸试验研究

Experimental Research on Microelectroforming with Ultrasound Stirring

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 0

编辑推荐

Metrics