关键词: 时栅角位移传感器, 开放式多轴运动控制器；自动检定；自准直仪

Abstract:

In order to resolve the problem of low efficiency and verification quality in the procedure of time grating angular displacement sensor quality verification due to manual reading mode,an automatic verification system for time grating angular displacement sensor was proposed.In the automatic verification system, the PMAC was selected as motion control unit and the direct driving motor was used as the driving equipment to reduce the ransmission errors.The  electronic autocollimators  ELCOMAT3000  with errors less than  ±0.25″  acts as the precision measuring instrument in the system. A  programmable linear trapezoidal acceleration motion model was presented in the motion control and one product quality verification algorithm was proposed to improve the quality verification. The experimental results show that the steps of product quality certification all are completed automatically and the accurate results of quality verification is obtained.The work efficiency is improved greatly and product quality of time grating angular displacement sensor is assured further.

Key words: time grating angular displacement sensor;programmable multi-axes , controller(PMAC);automatic verification;autocollimator