接触测量中的微探球力变形研究

中国机械工程 ›› 2014, Vol. 25 ›› Issue (14): 1926-1929.

接触测量中的微探球力变形研究

李志渤;黄强先;赵剑;尤焕杰;程真英

合肥工业大学,合肥,230009

出版日期:2014-07-25 发布日期:2014-08-25
基金资助:
国家自然科学基金资助项目（51175141);国家高技术研究发展计划（863计划）资助重点项目(2008AA042409)

Research on Force Deformation of Microball in Contact Measurement

Li Zhibo;Huang Qiangxian;Zhao Jian;You Huanjie;Cheng Zhenying

Hefei University of Technology,Hefei,230009

Online:2014-07-25 Published:2014-08-25
Supported by:
National Natural Science Foundation of China（No. 51175141）;National High-tech R&D Program of China (863 Program) （No. 2008AA042409）

摘要/Abstract

摘要：

随着微纳米测量系统中测头微探球尺寸的不断减小和测量不确定度要求的不断提高，测力所引起的力变形误差对测量系统不确定度有着不可忽略的影响。根据Hertz理论，构建了微探球与工件接触时的接触模型、微探球与试样力变形模型，给出了最大允许测力估计方法和力变形计算方法。以现有的3种微纳米三坐标测量机微探球为参考，分别估计了允许最大测力及引起的力变形。结果表明，对于纳米量级测量不确定要求，接触式测量中微探球的受力变形误差是不可忽略的。

关键词: 微探球, 力变形, 微纳米测量；接触测量

Abstract:

As the size of microball used for micronano measurement system decreased continuously and the uncertainty of measurement in nanometer measurement should be improves constantly, the influence of deformation caused by measurement force on the uncertainty of the measurement system was becoming an issue gradually that could not be ignored. Herein, the contact model between the microball and the workpiece, and the force deformation model of microball and workpiece were built based on Hertz theory, and then the estimation method of maximum allowable measurement force and the force deformation were given. Microballs made of three kinds of material, which were used for micronano CMM were selected as reference, the maximum allowable measurement force and the deformation were estimated. The results show that the errors of force deformation should not to be ignored and needs to be paid more attention in contact nanomeasurement.

Key words: microball, force deformation, micronano measurement, contact measurement

中图分类号:

TH711

李志渤, 黄强先, 赵剑, 尤焕杰, 程真英. 接触测量中的微探球力变形研究[J]. 中国机械工程, 2014, 25(14): 1926-1929.

Li Zhibo, Huang Qiangxian, Zhao Jian, You Huanjie, Cheng Zhenying. Research on Force Deformation of Microball in Contact Measurement[J]. China Mechanical Engineering, 2014, 25(14): 1926-1929.

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