基于MEMS机构装配的微夹持器研究

中国机械工程 ›› 2014, Vol. 25 ›› Issue (5): 596-601.

基于MEMS机构装配的微夹持器研究

郝永平1;董福禄1;张嘉易1;包丽雅2

1.沈阳理工大学辽宁省先进制造与装备重点实验室，沈阳,110159
2.中国空空导弹研究院，洛阳，471009

出版日期:2014-03-10 发布日期:2014-03-21
基金资助:
国家高技术研究发展计划(863计划)资助项目(2009AA04Z167)；辽宁省自然科学基金资助项目（201102182）

Study on Micro-gripper Based on MEMS Mechanism Assembly

Hao Yongping1;Dong Fulu1;Zhang Jiayi1;Bao Liya2

1.Key Laboratory of Advanced Manufacture and Equipment of Liaoning Province,Shenyang Ligong University, Shenyang, 110159
2.China Airborn Missile Academy,Luoyang,471009

Online:2014-03-10 Published:2014-03-21
Supported by:
National High-tech R&D Program of China (863 Program) （No. 2009AA04Z167）;Liaoning Provincial Natural Science Foundation of China（No. 201102182）

摘要/Abstract

摘要：

微夹持器作为末端执行装置，直接决定了微装配的效率。MEMS机构中包含许多微小的活动部件和功能元件，为实现这些微小器件的稳定夹取和自动装配，设计了一种采用压电陶瓷驱动、基于柔性铰链的二级放大微夹持器结构。对该微夹持器的节点应力、刚度及最大张合量等进行了分析计算，并对微夹持器进行了试制。实验与分析结果表明，该夹持器最大张合量是245μm，放大倍数约为12.3倍，满足MEMS机构的装配要求。在此基础上，重点对张合量与夹持力进行了系统测试，通过对测试数据的非线性回归，推导出99.99%可靠度的驱动电压计算公式，实现了微夹持的精确控制。

关键词: 微机电系统, 微装配, 微夹持器, 压电陶瓷, 柔性铰链, 非线性回归

Abstract:

Micro-gripper as end devices, directly determined the efficiency of the micro-assembly. MEMS mechanism contained many tiny moving parts and functional elements, so as to achieve the stabally gripping and automatic assembly of these tiny devices. A micro-gripper with two grade displacement amplification was designed, which was actuated by piezoelectric ceramics and based on flexible hinges. The micro-gripper node stress, stiffness and maximum deformation, etc. were analyzed and calculated, and the micro-gripper prototype was produced. The experimental results show that the maximum deformation levels of the gripper is as 245μm, the magnification is about 12.3 times, that meets the requirements of MEMS micro-assembly. On this basis of above, the deformation and gripping force were focused on, and a formula of 99.99% reliability drive voltage was derived by nonlinear regression of the test data, and the precise control of the micro-gripper is achieved.

Key words: micro-electro mechanical system(MEMS);micro-assembly, micro-gripper, piezoe-lectric transducer(PZT), flexible hinge, nonlinear regression

中图分类号:

TP242.2

郝永平, 董福禄, 张嘉易, 包丽雅. 基于MEMS机构装配的微夹持器研究[J]. 中国机械工程, 2014, 25(5): 596-601.

Hao Yongping, Dong Fulu, Zhang Jiayi, Bao Liya. Study on Micro-gripper Based on MEMS Mechanism Assembly[J]. China Mechanical Engineering, 2014, 25(5): 596-601.

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