一种低成本微定位平台的设计与仿真

中国机械工程 ›› 2013, Vol. 24 ›› Issue (5): 585-588,609.

一种低成本微定位平台的设计与仿真

卢清华1;吴志伟2;范彦斌1;张宪民2

1.佛山科学技术学院，佛山，528000
2.华南理工大学，广州，510640

出版日期:2013-03-10 发布日期:2013-03-19
基金资助:
国家自然科学基金资助项目（51105077）；广东省自然科学基金资助项目（S2011010001218）；广东省教育厅科技创新项目（2012KJCX0103）；佛山市科技发展专项资金资助项目(FZ2010036)；广东省精密装备与制造技术重点实验室开放基金资助项目
National Natural Science Foundation of China（No. 51105077）;

Guangdong Provincial Natural Science Foundation of China（No. S2011010001218）;

Design and Simulation of a Low-cost Micro-positioning Stage

Lu Qinghua1;Wu Zhiwei2;Fan Yanbin1;Zhang Xianmin2

1.Foshan University,Foshan,Guangdong,528000
2.South China University of Technology,Guangzhou,510640

Online:2013-03-10 Published:2013-03-19
Supported by:

National Natural Science Foundation of China（No. 51105077）;

Guangdong Provincial Natural Science Foundation of China（No. S2011010001218）;

摘要/Abstract

摘要：

针对半导体及微纳制造等领域对微定位系统低成本高精度的要求，根据以宏观的输入获得微观的输出、低精度驱动器输入获得高精度输出的设计思想，设计了一种基于柔性铰链差式杠杆机构的低成本微定位平台。在该平台中，通过设计位移缩放机构，将驱动器的宏观输入位移进行比例缩小，实现平台的微观输出，降低微定位平台的成本。分析了微定位平台的刚度，并根据该平台定位机构所受载荷的不同，设计了两种不同的柔性铰链。在此基础上，建立了该平台的有限元分析模型，采用ANSYS对该平台的应力进行了分析，并对该平台的输出位移进行了仿真。仿真结果证明了该微定位平台的可行性。

关键词: 微定位平台, 低成本, 高精度, 差式杠杆机构

Abstract:

To meet the demands of low-cost and high accuracy for the micro-positioning system in the fields of such as semiconductor and micro/nano manufacturing, a low-cost micro-positioning stage was proposed based on differential lever mechanisms with flexure hinge, which utilized macro-displacement and low accuracy input will realize micro-displacement and high accuracy ouput. First, the macro-displacement of the actuator was scaled down to realize micro-displacement ouput by designing a zooming mechanism, thus reducing the cost of this stage. Second, the stiffness of this stage was analyzed, and two different flexure hinges were presented according to different load distributions in the positioning mechanisms. Finally, a finite element model of the stage was established, and the stress of the stage was analyzed using ANSYS software. In addition, the output displacement of this micro-positioning stage was implemented by simulation analysis. Simulation results show such a micro-positioning stage is feasible.

Key words: micro-positioning stage, low-cost, high accuracy, differential lever mechanism

中图分类号:

TH122

卢清华1, 吴志伟2, 范彦斌1, 张宪民2. 一种低成本微定位平台的设计与仿真[J]. 中国机械工程, 2013, 24(5): 585-588,609.

LEI Qing-Hua-1, TUN Zhi-Wei-2, FAN Pan-Bin-1, ZHANG Xian-Min-2. Design and Simulation of a Low-cost Micro-positioning Stage[J]. China Mechanical Engineering, 2013, 24(5): 585-588,609.

参考文献

[1]Liu C, Jywe W Y, Jeng Y R, et al. Design and Control of a Long-traveling Nano-positioning Stage[J]. Precision Engineering, 2010, 34(3): 497-506.
[2]Kim H S, Cho Y M. Design and Modeling of a Novel 3-DOF Precision Micro-stage[J]. Mechatronics, 2009, 19(5): 598-608.
[3]刘定强,黄玉美,谢礼, 等. 平面宏微驱动系统微动台的刚度计算[J]. 中国机械工程, 2011, 22(1): 88-91.
Liu Dingqiang, Huang Yu Mei, Xie Li, et al. Stiffness Calculation of Micro-feed Table in Macro-micro Dual Drive Plane Load[J]. China Mechanical Engineering, 2011, 22(1): 88-91.
[4]孙立宁，马力，荣伟彬，等. 一种纳米级二维微定位工作台的设计与分析[J]. 光学精密工程, 2006, 14(3): 50-54.
Sun Lining, Ma Li, Rong Weibin, et al. Design and Analysis on a 2-DOF Nanopositioning Stage[J]. Optics and Precision Engineering, 2006, 14(3): 50-54.
[5]Wang H, Zhang X M. Input Coupling Analysis and Optimal Design of a 3-DOF Compliant Micro-positioning Stage[J]. Mechanism and Machine Theory, 2008, 3(4): 400-410.
[6]Martin L C, Gordon A. Design of a Low-cost Nano-manipulator, Which Utilizes a Monolithic, Spatial Compliant Mechanism[J]. Precision Engineering, 2004, 28(4): 469-482.
[7]Tanikawa T, Ukiana M, Morita K, et al.Design of 3-DOF Parallel Mechanism with Thin Plate for Micro Finger Module in Micro-manipulation[C]//The 2002 IEEE/RSJ Intl. Conference on Intelligent Robots and Systems.Lausanne,2002:1778-1783.
[8]王华,张宪民.低成本柔顺板式精密定位平台的理论与试验[J].机械工程学报,2008,44(10):177-181.
Wang Hua, Zhang Xianmin. Theory and Experiment for a Low-cost Precise Positioning Stage Based on Compliant Plate[J]. Journal of Mechanical Engineering, 2008, 44(10）:177-181.
[9]于靖军, 毕树生, 宗光华. 全柔性微位移放大机构的设计技术研究［J］.航空学报，2004，25（1）：74-78.
Yu Jinjun, Bi Shusheng, Zong Guanghua. Study on the Design of Fully Compliant Motion Amplification Mechanisms in Actuation Systems for Micromanipulators[J]. Acta aeronautica etastronautica sinica, 2004，25（1）：74-78.
[10]吴博达, 李军, 杨志刚, 等. 具有柔性铰链的差式微位移放大机构[J]. 压电与声光, 1999,21(2)：96-99.
Wu Boda, Li Jun, Yang Zhigang, et al. A Differential Action Microscopic Displacement Magnifying Mechanism with Flexure Hinges[J]. Piezoelectrics & Acoustooptics, 1999,21(2)：96-99.
[11]张建瓴, 陈万银,可欣荣. 一种微位移放大机构的设计与仿真[J]. 机械设计, 2009, 26(12):9-12.
Zhang Jianling, Chen Wanyin, Ke Xinrong. Design and Simulation of a Kind of Micro-displacement Amplification Mechanism[J]. Journal of machine design, 2009, 26(12):9-12.
[12]北京集科仪器有限公司.07ML测微头． [2011-12-08]. http://jk-stage.com/ProductListMore.aspx?id=106.
[13]Lobontiu N, Paine J S N, Garcia E,et al.Corner-filleted Flexure Hinges[J].ASME Journal of Mechanical Design, 2001, 123(3): 346-352.
[14]吴鹰飞,周兆英. 柔性铰链转动刚度计算公式的推导[J]. 仪器仪表学报, 2004, 25(1):125-128.
Wu Yingfei, Zhou Zhaoying. Deduction of Design Equation of Flexure Hinge[J]. Chinese Journal of Scientific Instrument, 2004, 25(1):125-128.