静电微泵的3D流固耦合动态特性分析

中国机械工程 ›› 2012, Vol. 23 ›› Issue (5): 599-603.

静电微泵的3D流固耦合动态特性分析

董金新1;林谢昭2;应济2;李俊2

1.温州职业技术学院,温州,325035

2.浙江大学,杭州,310027

出版日期:2012-03-10 发布日期:2012-03-21
基金资助:
国家自然科学基金资助项目（50475104）；浙江省自然科学基金资助重点项目（Z106519）
National Natural Science Foundation of China（No. 50475104）;
Key Program of Zhejiang Provincial Natural Science Foundation of China（No. Z106519）

A Study of 3D Full Coupled Field Dynamic Characteristics of an Electrostatic Valveless Micropump

Dong Jinxin1;Lin Xiezhao2;Ying Ji2;Li Jun2

1.Wenzhou Vocational & Technical College,Wenzhou,Zhejiang,325035

2.Zhejiang University,Hangzhou,310027

Online:2012-03-10 Published:2012-03-21
Supported by:

National Natural Science Foundation of China（No. 50475104）;
Key Program of Zhejiang Provincial Natural Science Foundation of China（No. Z106519）

摘要/Abstract

摘要：

采用任意拉格朗日—欧拉（ALE）描述建立了无阀微泵的静电－结构－流体全耦合三维模型,数值仿真表明：泵内流体的动态特性与泵膜的运动存在着密切的关系;扩散/收缩口单元两端的压力差必须达到一定值后才有“整流”泵送效用;泵腔内流体压力的分布几乎一致;流体流动的最大雷诺数远小于宏观条件下认定的临界雷诺数;流体黏滞损失的非线性不容忽视。



关键词:

无阀微泵, 流固耦合, 静电驱动, 数值仿真, MEMSCAD

Abstract:

A 3-Dimensional accurate analysis of the electrostatic valveless micropump involved in electrostatic dynamics, structural dynamics and fluid dynamics of the system. This was made by using multi-field coupled analysis. The results show that the dynamic characteristics of fluid in the micropump are dependent highly on the vibration of flexible membrane. The flow rectification function of the diffuser/nozzle element will work only after the pressure difference between the two ends of the element reaches a critical value. In the pump chamber, the fluidic press distribution almost independent of the depth variation. The maximum of Reynolds numbers is far less than the traditional critical Reynolds number. Due to the increasing demands for accuracy, the nonlinear features of viscous loss of the fluid can no longer be neglected or simplified, but have to be taken into account in detail.

Key words: valveless micropump, fluid-structure interaction;electrostatic action;numerical simulation;MEMSCAD

中图分类号:

TH38
TP271.3

董金新1, 林谢昭2, 应济2, 李俊2.

静电微泵的3D流固耦合动态特性分析

[J]. 中国机械工程, 2012, 23(5): 599-603.

DONG Jin-Xin-1, LIN Xie-Zhao-2, YING Ji-2, LI Dun-2.

A Study of 3D Full Coupled Field Dynamic Characteristics of an Electrostatic Valveless Micropump

[J]. China Mechanical Engineering, 2012, 23(5): 599-603.

参考文献

[1]Morris C J, Forster F K. Low--order Modeling of Resonance for Fixed--valve Micropumps Based on First Principles [ J ]. Journal Microelectromech. Syst. , 2003, 12: 325-334.
[2]Olsson A, Stemme G, Stemme E. A Numerical De- sign Study of the Valveless Diffuser Pump Using a Lumped--mass Model[J]. Journal Mieromeeh. Mi- croeng. , 1999, 9: 34-44.
[3]Bourouina T, Grandchamp J P. Modeling Mi- cropumps with Electrical Equivalent Networks[J]. Journal Micromech. Microeng. , 1996, 6: 398-404.
[4]Lin X Z, Ying J, Chen Zichen. Research on Termi- nal Behavior of Electrostatically Actuated Mi- cropump Membrane Based on Modal Analysis[C]// Wei Y L, Chong K T, Takahashi T, et al. ICMIT 2005: Mechatronics, MEMS and Smart Materials, SPIE. Bellingham, 2005,6040: P60400U.
[5]Faris W F, Abdel--Rahman E M, Nayfeh A H. Mechanical Behavior of an Electrostatically Actuated Micropump[C]//Agnes G, Chamis C, Noor A, et al. 43rd AIAA/ASME/ASCE/AHS/ASC Struc- tures, Structural Dynamics, and Materials Confer- ence. Denver, 2002: AIAA2002-1303.
[6]Morris C J , Forster F K . Optimization of a Circular Piezoelectric Bimorph for a Micropurnp Driver[J]. Jour- nal Micromech. Microeng. , 2000, 10: 65-459.
[7]王立文[1],高殿荣[2],杨林杰[2],李岩[2],王广义[2],范卓立[2].压电驱动微泵泵膜振动有限元分析[J].机械工程学报,2006,42(4):230-235.
[8]Ullman A, Fono I. The Piezoelectric Valve--less Pump--improved Dynamic Model[J]. Journal Mi- croelectromech. Syst. , 2002, 11: 655-664.
[9]Pan L S, Ng T Y,Wu X H,et al. Analysis of Valve- less Micropumps with Inertial Effects[J]. Journal Mi- cromech. Microeng. , 2003, 13:390-399.
[10]MacHauf A, Nemirovsky Y, Dinnar U. A Mem- brane Micropump ELectrostaticalLy Actuated Across the Working Fluid[J]. Journal Micromech. Microeng. , 2005,15(12) : 2309.
[11]白兰[1],冯志庆[2],吴一辉[3].无阀微泵动态特性的固液耦合分析[J].机械工程学报,2008,44(7):69-74.
[12]谢海波,傅新,杨华勇.微型无阀泵流动特征仿真与试验研究[J].机械工程学报,2002,38(7):54-57.
[13]杨恺祥.压电无阀式微泵浦制造与测量分析[D].台湾云祺科技大学,2004.
[14]Tsui Y Y,Lu S L. Evaluation of the Performance of a Valveless Micropump by CFD and Lumped-- system Analyses[J]. Sensors and Actuators A: Physical, 2008,148(1): 138.
[15]Yao Q, Xu D, Pan L S, et al. CFD Simulation of Flows in Valveless Micropumps[J]. Eng. Appl.Comput. Fluid Mech. , 2007,1(3) :181-188.
[16]林谢昭[1,2],应济[2],陈子辰[2].静电无阀微泵两种仿真模型的比较研究[J].哈尔滨工业大学学报,2010(12):1943-1947.