大面积金刚石膜, 衬底温度, 数据融合, 稳健性

Considering the measurement with requirements of high precision and stability for large area diamond film substrate temperature, the necessity of multi-branch measuring data fusion was analyzed. Different data fusion methods were utilized to carry out the data fusion research of sampled substrate temperature data. The robustness of data fusion method was analyzed in details. The research results demonstrate that multi-branch substrate temperature data fusion for large area diamond film can reflect the actual substrate temperature more truly, and the fusion results are with high precision; when temperature measurement is affected by non-normal disturbances or even by sensors’ breakdown, the data fusion results can still be with high precision, and the performance of rejecting disturbance and sensors’ breakdown is improved significantly.